Edwards STP-iS2207 Series - Table of Contents

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 3
1.3.1 Warranty period 3
1.3.2 Item warranted 3
1.3.3 Disclaimer 4
1.3.4 Spare parts 4
1.4 Precautions for safe operation of the STP pump 5
1.4.1 Usable gases 5
1.5 Maintenance and inspection precautions 6
1.6 Labels 6
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 11
2.1 STP pump specifications 11
2.2 Maximum gas flow-rate 12
2.3 Water cooling use condition 13
2.4 Control unit 14
2.5 External appearance of the STP pump 16
2.6 Label affixing positions 17
3 INSTALLATION OF THE STP PUMP 19
3.1 Precautions before installation 19
3.1.1 Operating environment 19
3.1.2 Installation area 21
3.1.3 Bench 22
3.1.4 Insulation test 22
3.2 Unpacking and installation 23
3.3 Name and function of each part 27
3.3.1 Name and function of the pump 27
3.3.2 Name and function of the control unit 28
3.4 How to install the STP pump 32
3.4.1 Cleaning the seal 33
3.4.2 STP pump installation positions 34
3.4.3 Secure the STP pump 35
3.4.4 Legs for securing the base 39
3.4.5 Power cable 40
3.4.6 How to connect the power cable 42
3.5 Precautions of vacuum piping 44
3.5.1 Vacuum piping method 45
3.6 Introducing N
2
gas
(for the STP pump equipped with purge port) 45
3.7 Connecting the water cooling pipe 46
3.8 Attaching a baking heater 47