Edwards STP-iS2207 Series User Manual

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page ii
PAGE
ii
CONTENTS (CONTINUED)
Section Title Page
3.9 Connecting to semiconductor equipment 48
3.9.1 Connecting to power 48
3.9.2 Emergency off circuit (EMO circuit) 48
4 OPERATION 49
4.1 Gas pumping, cooling and baking the STP pump 49
4.1.1 Gas pumping 49
4.1.2 How to introduce a purge gas 50
4.2 Cooling the STP pump 50
4.2.1 Water-cooling method 50
4.3 Baking the STP pump 51
4.4 Before starting the STP pump 52
4.4.1 Confirmation before starting 52
4.4.2 Confirmation of vacuum system 52
4.5 Powering ON 53
4.6 Pump operation 53
4.6.1 Input operation port setting 53
4.6.2 Starting/stopping the STP pump 54
4.7 How to start/stop the STP pump 55
4.7.1 Starting the STP pump after stopping 55
4.7.2 Starting the STP pump after a safety function operates 55
4.7.3 Powering OFF 55
4.8 LED 56
4.9 Parallel port input/output signal 57
4.9.1 Input signal pins 57
4.9.2 Input operation port setting 60
4.9.3 Second speed option 61
4.9.4 Output signal pins 62
5 SERIAL COMMUNICATION PROTOCOL 67
5.1 Introduction 67
5.2 Connection and setting up 68
5.2.1 Signal connection 68
5.2.2 Connecting the RS485 70
5.2.3 Communication parameter setting 71
5.2.4 Input operation port setting 72
5.2.5 Serial communication timeout setting 73
5.2.6 Recommended items about communication cable installation 74
5.3 Protocol specifications 77
5.3.1 General description 77
5.3.2 Standard transmission frame
(in the RS232/RS485 single point connection) 78
5.3.3 Control command
(in the RS232/RS485 single point connection) 79
5.3.4 Query command
(in the RS232/RS485 single point connection) 80
5.3.5 Transmission data format 81
5.3.6 Frame control (checksum) 82

Edwards STP-iS2207 Series Specifications

General

Brand	Edwards
Model	STP-iS2207 Series
Category	Water Pump
Language	English