EasyManua.ls Logo

Edwards STP-iXA3306CV - User Manual

Edwards STP-iXA3306CV
181 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Loading...
MT-82E-001-H
STP Series Turbomolecular Pumps
STP-iXA3306 Series
Instruction Manual
Copyright 2016 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.

Table of Contents

Questions and Answers:

Edwards STP-iXA3306CV Specifications

General IconGeneral
BrandEdwards
ModelSTP-iXA3306CV
CategoryWater Pump
LanguageEnglish

Summary

Instruction Manual

Introduction to the STP Pump

Safety Precautions for STP Pump Operation

Outlines critical safety measures for operating the STP pump.

STP Pump Specifications

Details the specifications for different STP pump models.

Technical Data

STP Pump Specifications Overview

Provides typical values for STP pump specifications.

Maximum Gas Flow-Rate

Lists maximum gas flow rates for different conditions.

Control Unit Details

Details the specifications and components of the control unit.

Installation of the STP Pump

Installation Precautions and Environment

Lists essential precautions and environment requirements for installation.

Installation Area Requirements

Specifies requirements for the installation environment.

STP Pump Installation and Seal Cleaning

Provides steps for installing the STP pump and cleaning seals.

Securing the STP Pump

Details methods for securely mounting the STP pump.

Base Securing Legs and Power Cable

Explains base securing holes and power cable connection.

Power Cable Connection Details

Provides detailed steps for connecting the power cable.

Vacuum Piping Precautions

Outlines important precautions for vacuum piping.

Connecting to Semiconductor Equipment

Details connections for semiconductor equipment.

Operation of the STP Pump

Gas Pumping, Cooling, and Baking Procedures

Covers the initial steps of operating the STP pump.

STP Pump Cooling Procedures

Details the cooling procedures for the STP pump.

Pre-Start Operations and Checks

Pre-start checks and confirmations for the STP pump.

Powering ON the STP Pump

Steps to power on the STP pump and check the initial state.

General Pump Operation

General overview of pump operation and settings.

Starting and Stopping the STP Pump

Describes two methods for starting and stopping the pump.

Parallel Port InputOutput Signals

Details the parallel port signals for remote control.

Serial Communication Protocol

Introduction to Serial Communication

Introduces the serial communication capabilities and protocols.

Serial Port Connection and Setup

Details how to connect and set up serial communication ports.

Protocol Specifications Overview

Overview of the protocol specifications.

Control Command for RS232 RS485 Single Point

Details control commands for single-point connections.

Query Command for RS232 RS485 Single Point

Explains query commands for single-point connections.

RS485 Multi-Point Control Command

Control commands for RS485 multi-point connections.

RS485 Multi-Point Query Command

Query commands for RS485 multi-point connections.

Command Specifications Overview

Overview of available commands.

ReadMeas Command

Command to read the measured rotational speed.

Pump Control Commands (START, STOP, RESET)

Commands for START, STOP, and RESET operations.

SetSpeedSetPoint Command

Changes the speed set point value.

Safety Functions of the STP Pump

Overview of Safety Functions

Overview of the pump's safety functions.

Power Failure Handling

Describes the pump's behavior during a power failure.

Troubleshooting After Failure

Steps for troubleshooting after a failure.

General Troubleshooting Guide

General troubleshooting procedures.

Maintenance and Inspection

Maintenance and Inspection Precautions

General precautions for maintenance and inspection.

Related product manuals