Edwards STP-iXA3306CV - Warning Function Overview

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 133
5
SERIAL C
OMMUNICATION PROTOCO
L
Parameter
6a
6b
6c
6d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
7a
7b
[Omitted]
21d
ASCII
F
F
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
Parameter
22a
22b
22c
22d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
*1 System reservation