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Edwards STP-iXA3306CV - Overspeed Protection; TMS Unit Abnormality;Error Handling

Edwards STP-iXA3306CV
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STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 132
5
SERIAL COMMUNICATION
PROTOCOL
Example:
In case of Disturbance X_H detection at September 13, 2007 12: 34
Parameter
a
b
c
d
ASCII
0
D
0
1
0
7
0
9
1
3
1
2
3
4
*3
*3
*3
*3
*3
*3
HEX
30
44
30
31
30
37
30
39
31
33
31
32
33
34
*3 System reservation
Example:
When 3 errors have been detected in the past;
The number of "Error Record": 03
hex
= 3 errors
The maximum number of "Error Record": 14
hex
= 20 errors
Error Record 1: Error Code 0F
hex
= 15 = Disturbance Xb
Time flag 01
hex
= Detection time is built-in clock time
Error detection time 0709131234
hex
= Sep. 13, 2007 at 12:34
Error Record 2: Error Code 0D
hex
= 13 = Disturbance Xh
Time flag 01
hex
= Detection time is built-in clock time
Error detection time 0704300659
hex
= Apr. 30, 2007 at 06:59
Error Record 3: Error Code 12
hex
= 18 = MOTOR Overheat
Time flag 01
hex
= Detection time is built-in clock time
Error detection time 0612011508
hex
= Dec. 1, 2006 at 15:08
Error Record 4 to 20 No error recorded
Parameter
1
2
ASCII
0
3
1
4
HEX
30
33
31
34
Parameter
3a
3b
3c
3d
ASCII
0
F
0
0
0
7
0
9
1
3
1
2
3
4
*1
*1
*1
*1
*1
*1
HEX
30
46
30
30
30
37
30
39
31
33
31
32
33
34
Parameter
4a
4b
4c
4d
ASCII
0
D
0
0
0
7
0
4
3
0
0
6
5
9
*1
*1
*1
*1
*1
*1
HEX
30
44
30
30
30
37
30
34
33
30
30
36
35
39
Parameter
5a
5b
5c
5d
ASCII
0
F
0
0
0
6
1
2
0
1
1
5
0
8
*1
*1
*1
*1
*1
*1
HEX
30
46
30
30
30
36
31
32
30
31
31
35
30
38

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