Edwards STP-iXA3306CV - Base Securing Legs and Power Cable

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 29
INSTALLATION
3
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 16 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Figure 16 - Configuration of the STP pump
Item
Description
Function
1
Inlet port flange
Connected to the vacuum equipment (at the high vacuum side).
2
Outlet port flange
Connected to the inlet port side of the backing-pump.
3
Purge port
Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gas, gas including hydrogen.
4
Cooling water port
(water cooling unit)
Connected to the STP pump cooling water pipe.
5
Control unit
Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
Table 7 - Pump functions
1
2
5
4
3