Edwards STP-iXA3306CV - Spare Parts

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 4
INTRODUCTION
1
14. Any direct, incidental or consequential damage resulting from the use of the product.
15. When continuously operated without overhaul after the WARNING indication on the “Failure”
LED of the control unit or the LCD ("WARNING" message) of the display unit iDT-001.
16. Overhaul and replacement of maintenance parts.
1.3.4 Spare parts
 Touch down bearing.
 Air-cooling fan
Touch down bearing and air-cooling fan should be replaced at Edwards, contact Edwards.