Edwards STP-iXA3306CV - Pre-Start Operations and Checks

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 46
INSTALLATION
3
Note: Maximum flow for water cooled and TMS unit are applicable under the condition listed in
Section 2.3, "Water cooling use condition".
3.6 Connecting the purge port
When pumping reactive or corrosive gas, gas including hydrogen, introduce a dry N
2
gas or other gas
into the STP pump in order to protect the inside of the STP pump. To isolate (Lockout/Tagout) the
purge gas N
2
, introduce a dry N
2
gas through the electromagnetic vent. valve, needle valve or similar
valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, see Section 4.1.2.
Note: When not introducing the purge gas, close the purge port with the blank flange.
1
Outlet port flange
2
Purge port (Dry N
2
gas or other)
Figure 26 - Connecting the purge port
2
1