Edwards STP-iXA3306CV - STP-Ixa3306 B;Bv; Maximum Gas Flow-Rate (STP-Ixa3306 B); Maximum Gas Flow-Rate (STP-Ixa3306 Bv)

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 15
TECHNICAL DATA
2
2.2.2 STP-iXA3306B/BV
Cooling water
backing-pump
Gas
Maximum gas flow-rate
[Pa･m
3
/s]
[SCCM]
15 to 25 ºC
> 1,300 L/min
Ar
3.72
2200
N
2
4.05
2400
> 10,000 L/min
Ar
5.24
3100
N
2
6.76
4000
26 to 35 ºC
> 1,300 L/min
Ar
3.72
2200
N
2
4.05
2400
> 10,000 L/min
Ar
4.90
2900
N
2
6.59
3900
Table 3 - Maximum gas flow-rate (STP-iXA3306B)
Cooling water
backing-pump
Gas
Maximum gas flow-rate
TMS
(setting value)
[Pa･m
3
/s]
[SCCM]
15 to 25ºC
> 1,300 L/min
Ar
3.55
2100
70 ºC
N
2
3.89
2300
> 10,000 L/min
Ar
4.23
2500
N
2
6.42
3800
Table 4 - Maximum gas flow-rate (STP-iXA3306BV)
*1 The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the purge gas
flow rate <N
2
> 8.4×10
-2
±1.7×10
-2
Pa•m
3
/s (50±10 SCCM) is used. It is changed depending on condition. For example, when
the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact
Edwards.