EasyManua.ls Logo

Edwards STP-iXA3306CV - STP Pump Specifications

Edwards STP-iXA3306CV
181 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 10
INTRODUCTION
1
1.8 STP pump specification
External appearance, installation and unpacking method differ depending to the STP pump model.
Refer to the followings:
Standard
(corrosion resistant type)
TMS specification
(corrosion resistant type with TMS)
STP-iXA3306C
STP-iXA3306B
STP-iXA3306CV
STP-iXA3306BV
Naming convention:
"C" following a pump model name indicates a corrosion resistant
*1
type.
(e.g. STP-iXA3306C)
"B" following a pump model name indicates corrosion resistant
*1
and high-emissivity
*2
coating
type.
(e.g. STP-iXA3306B)
"V" indicates a TMS
*3
unit.
(e.g. STP-iXA3306CV)
*1
Corrosion resistant: STP pump with anti-corrosive treatment.
*2
High-emissivity coating: STP pump with rotor covered with high-emissivity coating.
*3
Temperature Management System: TMS maintains the temperature of the turbomolecular pump by monitoring the
temperature with the thermistor in the base of the turbomolecular pump, and performing the TMS heater ON/OFF control in
order to maintain a constant temperature of the STP pump.
TMS valve

Table of Contents

Related product manuals