Edwards STP-iXA3306CV - Error List (Continued)

STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 155
7
SAFETY FUNCTIONS
Referred
Section
7.1.1
3.8.2
3.8.2
3.8.1
3.5
Table
53 - Error List
(continued)
Countermeasures
Contact Service office.
Contact Service office.
1. Check whet
her or not a
power failure has occurred.
2. Connect the power cable
correctly.
3. Replace the power cable.
4. Set the
rated
voltage ±
10 %
.
1. Check the volume of water
and water temperature with water cooling unit.
In order
to recover, turn off the power (switch "OFF
"), and
then switch "ON" after sufficient cooling of the control
unit
(isolate input power supply 3 minutes or more
)
2. Contact Service office.
Probable causes
Disconnection of the
motor
temperature
sensor
.
Failure of the
control unit.
1. Power failure
.
2. Incorr
ect connection of the
power cable.
3. Failure of
the power cable.
4. Failure of the power supply
vlotage.
1. Insufficient cooling of the
control unit
.
2. Failure of
the
control
unit.
Occurrence
condition
Abnormal
motor
temperature detection
Rotaional speed exceeds r
ated
speed
Insufficient power supply
Overheat inside the
control
unit
.
Pump operation
Decelerat
e and
stop
Decelerat
e and
stop
Decelerat
e and
stop
(Error
message
)
M_Temp Lost
Overspeed 1, 2, 3, 4
Power Failure
"FAILURE"
LED
Steady
red