Edwards STP-iXR1606 User Manual

MT-79E-001-D
STP Series Turbomolecular Pumps
STP-iXR1606
(Issue 1-d)
Instruction Manual
Copyright 2014 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
July
2014
Original Instructions

Edwards STP-iXR1606 Specifications

General

Brand	Edwards
Model	STP-iXR1606
Category	Water Pump
Language	English

Summary

Declaration of Conformity

INTRODUCTION

1.1 Scope and definitions

Defines the manual's scope and key terms.

1.2 Applied standards

Lists directives and standards the pump conforms to.

1.3 Limited warranty

Details the warranty terms and conditions for the product.

1.4 Precautions for safe operation of the STP pump

Outlines safety measures for operating the pump.

1.5 Maintenance and inspection precautions

Advises on precautions before maintenance.

1.7 Operation principle of the STP pump

Explains how the turbomolecular pump operates.

ILLUSTRATIONS

TABLES

TECHNICAL DATA

2.1 STP pump specifications

Lists typical technical specifications of the STP pump.

2.2 Maximum gas flow-rate

Details the gas flow rates under various conditions.

2.3 Water cooling use condition

Specifies requirements for the cooling water system.

2.4 Control unit

Provides specifications for the pump's control unit.

2.5 External appearance of the STP pump

Shows diagrams and dimensions of the pump's exterior.

INSTALLATION OF THE STP PUMP

3.1 Precautions before installation

Safety and skill requirements for installation personnel.

3.2 Unpacking and installation

Procedures for unpacking and preparing the pump for installation.

3.3 Name and function of each part

Identifies pump components and their functions.

3.4 How to install the STP pump

Step-by-step guide for installing the STP pump.

3.5 Precautions of vacuum piping

Important considerations for vacuum piping connections.

3.7 Connecting the water cooling pipe

Instructions for connecting the water cooling system.

3.9 Connecting to semiconductor equipment

Connecting the pump to semiconductor equipment.

OPERATION

4.1 Gas pumping, cooling and baking the STP pump

Overview of gas pumping, cooling, and baking procedures.

4.4 Before starting the STP pump

Checks and preparations before pump startup.

4.5 Powering ON

Steps to turn on the STP pump and its control unit.

4.6 Pump operation

General section on operating the pump.

4.7 How to start/stop the STP pump

Procedures for pump start/stop and reset.

4.9 Parallel port input/output signal

Details on using the parallel port for remote control.

SERIAL COMMUNICATION PROTOCOL

5.1 Introduction

Overview of the serial communication protocol for the pump.

5.2 Connection and setting up

Steps for connecting and configuring serial communication.

5.3 Protocol specifications

General description of the communication protocol.

5.4 Command specifications

Lists available commands for pump control and status.

STP-LINK and DISPLAY UNIT

6.1 STP-Link

Information about the STP-Link software application.

6.2 Display unit

Details on the iDT-001 display unit.

SAFETY FUNCTIONS

7.1 Safety functions

Overview of the pump's built-in safety functions.

7.5 Troubleshooting immediately after failure occurs

Steps for troubleshooting after a failure.

7.6 Troubleshooting

General troubleshooting guidance.

MAINTENANCE AND INSPECTION

8.1 Maintenance and inspection

General guidance on maintenance and inspection.

8.2 Cleaning

Procedures for cleaning the STP pump.

8.4 Maintenance

General maintenance information.

8.5 Transporting for repair or overhaul

Instructions for packing and shipping for service.

STORAGE AND DISPOSAL

9.1 Storage of the STP pump

Precautions for storing the pump long-term.

9.2 Disposal

Guidelines for disposing of the STP pump.

SERVICE, SPARES AND ACCESSORIES

10.1 Introduction

Information on obtaining parts and services.

10.2 Service

Overview of Edwards service offerings.

10.4 Accessories

Lists available accessories for the STP pump.