Edwards STP-iXR1606 - 3.3 Name and function of each part

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 27
INSTALLATION
3
3.3 Name and function of each part
3.3.1 Name and function of the pump
The STP pump in Figure 15 is a typical pump model. Refer to Section 2, "TECHNICAL DATA".
Figure 15 - Configuration of the STP pump
Item Description Function
1 Inlet port flange Connected to the vacuum equipment (at the high vacuum side).
2 Outlet port flange Connected to the inlet port side of the backing-pump.
3 Cooling water port Connected to the STP pump cooling water pipe.
4 Control unit Contains the electronics that control the pump. Refer to Section
3.3.2, "Name and function of the control unit, for details.
Table 3 - Pump functions
1
2
4
3
3