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Edwards STP-iXA2205 Series - User Manual

Edwards STP-iXA2205 Series
177 pages
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MT-63E-001-H
Copyright 2010 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickl
y
access it at an
y
time.
Nov. 2010
Instruction Manual
STP Series Turbomolecular Pumps
STP-iXA2205 Series
(Issue 1-h)

Table of Contents

Questions and Answers:

Edwards STP-iXA2205 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iXA2205 Series
CategoryWater Pump
LanguageEnglish

Summary

STP Pump Introduction and Standards

Scope and Definitions of STP Pump Manual

Provides installation, operation, and maintenance instructions for the STP pump.

STP Pump Applied Standards and Directives

Lists directives and standards the STP pump conforms to.

STP Pump Limited Warranty Information

Details the warranty terms and coverage for the STP pump product.

STP Pump Safe Operation Precautions

Outlines essential safety measures before operating the STP pump.

STP Pump Maintenance and Inspection Safety

Details critical safety precautions for performing maintenance and inspections.

STP Pump Warning and Instruction Labels

Describes the various warning and instruction labels affixed to the pump.

STP Pump Operation Principle and Features

Explains how the STP pump works and highlights its key features.

STP Pump Model Specifications

Lists the technical specifications for different STP pump models.

STP Pump Technical Data and Specifications

STP Pump Specifications Overview

Provides typical, non-guaranteed specifications for STP pumps.

STP Pump Maximum Gas Flow Rates

Details maximum gas flow rates under various cooling conditions.

STP Pump Water Cooling Requirements

Specifies the required conditions for using cooling water.

STP Pump Control Unit Specifications

Lists specifications for the control unit, including LEDs and connectors.

STP Pump Power Unit Specifications

Details the technical specifications for the power unit.

STP Pump External Appearance Diagrams

Shows diagrams and dimensions of the STP pump's external features.

STP Pump Power Unit External Appearance

Shows diagrams and dimensions of the power unit.

STP Pump Label Placement Guide

Illustrates the locations of various labels on the pump and power unit.

STP Pump Installation Procedures

Precautions Before STP Pump Installation

Outlines general precautions and personnel requirements for installation.

STP Pump Operating Environment Requirements

Details environmental conditions essential for safe pump installation.

STP Pump Installation Area Guidelines

Provides guidelines on required space for installation and maintenance access.

STP Pump Bench Installation Requirements

Details requirements for preparing a suitable bench for the pump.

STP Pump Insulation Test Cautions

Provides crucial cautions regarding insulation testing of the power unit.

STP Pump Unpacking Instructions

Instructions and warnings for safely unpacking the STP pump.

STP Pump Part Identification and Function

Identifies and explains the function of the STP pump's main components.

STP Pump Control Unit Details

Describes the control unit's front panel and indicators.

STP Pump Power Unit Details

Shows the front panel and connector panel of the power unit.

Installing the STP Pump to Vacuum Equipment

Provides instructions on how to install the STP pump to the vacuum equipment.

Cleaning STP Pump Seals and Flanges

Details the process for cleaning seals and flange surfaces.

STP Pump Installation Orientation Options

Discusses various installation orientations (vertical, horizontal, etc.).

Securely Fastening the STP Pump

Details how to securely fasten the STP pump, including torque values.

Attaching STP Pump Legs for Stability

Explains how to attach and use dedicated legs for securing the pump.

STP Pump Power Unit Installation

Provides instructions for installing the power unit.

External DC Power Supply Unit Specifications

Details specifications for using an external DC power supply.

Connecting the DC Cable for External Power

Instructions for connecting a DC cable for external power supply.

STP Pump Cable Connection Guidelines

General section covering all cable connections for the STP pump.

STP Pump Power Cable Connection Safety

Details precautions and instructions for connecting the power cable.

General STP Pump Cable Connection Instructions

Provides general safety and connection instructions for all cables.

STP Pump Vacuum Piping Precautions

Outlines important precautions for vacuum piping installation.

STP Pump Vacuum Piping Connection Method

Specifies how to connect inlet and outlet ports for vacuum piping.

Connecting the STP Pump Purge Port

Instructions for connecting the purge port for gas introduction.

Connecting the STP Pump Water Cooling

Details how to connect water cooling pipes and related precautions.

Attaching a Baking Heater to the STP Pump

Instructions for attaching the optional baking heater.

Installing the STP Pump TMS Unit

Instructions for installing the Temperature Management System (TMS) unit.

STP Pump and TMS Unit Configuration

Shows the configuration of the STP pump with the TMS unit.

TMS Heater and Valve Functions

Explains the functions of the TMS heater and TMS valve.

TMS Unit Installation and Connection

General precautions for TMS unit installation and cable connection.

Connecting Pump and TMS Valve

Shows how to connect the pump and TMS valve.

TMS Unit Specifications

Lists the technical specifications for the TMS unit.

Connecting STP Pump to Semiconductor Equipment

Instructions for connecting the STP pump to semiconductor equipment.

STP Pump Power Connection to Equipment

Details how to connect the pump to the power distribution system.

STP Pump Emergency Off (EMO) Circuit

Explains the function and considerations for the EMO circuit.

STP Pump Operation Guide

STP Pump Gas Pumping, Cooling, and Baking

General introduction to operating procedures for pumping, cooling, and baking.

Safe Gas Pumping Procedures for STP Pump

Provides detailed safety precautions for gas pumping operations.

Introducing Purge Gas to STP Pump

Instructions on introducing purge gas for pump protection.

Cooling the STP Pump During Operation

General instructions for cooling the STP pump during operation.

STP Pump Water-Cooling Method Details

Details the procedures and precautions for water cooling.

STP Pump Baking Process Instructions

Instructions and warnings for the baking process.

Pre-Start Checks for STP Pump Operation

Covers pre-start checks and confirmations for safe operation.

STP Pump Startup Confirmation Checklist

Lists checks to ensure the pump is ready for startup.

STP Pump Vacuum System Startup Checks

Checks related to the vacuum system before pump start.

Powering ON the STP Pump

Instructions for turning on the STP pump power.

STP Pump Operation Overview

General section on STP pump operation.

Setting STP Pump Input Operation Ports

How to configure input/output ports for pump operation.

Starting and Stopping the STP Pump (Contact Input)

Describes methods for starting/stopping using contact input.

Starting and Stopping the STP Pump (Voltage Input)

Describes methods for starting/stopping using voltage input.

STP Pump StartStop Operation Guide

General guide for STP pump start/stop operations.

Restarting STP Pump After Normal Stop

How to restart the pump after it has stopped normally.

Restarting STP Pump After Safety Function

Procedure for restarting after a safety function triggers a stop.

Powering OFF the STP Pump Safely

Instructions for safely powering off the STP pump.

STP Pump LED Status Indicators

Explains the meaning and states of the pump's LEDs.

STP Pump Parallel Port IO Signals

Details the remote input/output signals via the X2 REMOTE connector.

STP Pump Parallel Port Input Signal Pins

Explains input signal pins for contact and voltage input.

Setting STP Pump Input Operation Ports

How to set the input operation port (parallel/serial).

STP Pump Rotation INHIBIT Signal

How the rotation inhibit signal affects pump operation.

STP Pump Parallel Port Output Signal Pins

Explains the output signal pins and their abbreviations.

Operating the STP Pump TMS Unit

Instructions for operating the optional TMS unit.

TMS Unit Startup Checks and Operation

Checks and basic operation for the TMS unit.

STP Pump Serial Communication Protocol

Serial Communication Protocol Overview

Introduces the serial communication capabilities and protocols.

Serial Communication Connection and Setup

Covers physical connections and setup for serial communication.

STP Pump Serial Port Signal Connections

Details signal connections for COM1 and COM2 ports.

Connecting the RS485 Communication Interface

Instructions for connecting RS485 communication.

STP Pump Communication Parameter Settings

Details factory and PC settings for communication parameters.

Setting the STP Pump Input Operation Port

How to set the input operation port for serial communication.

STP Pump Serial Communication Timeout

How to configure serial communication timeout settings.

STP Pump Communication Protocol Specifications

General overview of the communication protocol.

STP Pump Standard Transmission Frame

Details the structure of a standard transmission frame.

STP Pump Control Commands (RS232 RS485)

Format and usage of control commands for RS232/RS485.

STP Pump Query Commands (RS232 RS485)

Format and usage of query commands for RS232/RS485.

STP Pump Transmission Data Format

Specifies the format for transmitting data values.

STP Pump Frame Control and Checksum

Explains frame control and checksum calculation (LRC).

STP Pump RS485 Multi-point Transmission Frames

Details transmission frames for RS485 multi-point connections.

STP Pump Control Commands (RS485 Multi-point)

Control commands for RS485 multi-point connections.

STP Pump Query Commands (RS485 Multi-point)

Query commands for RS485 multi-point connections.

STP Pump Broadcast Commands (RS485 Multi-point)

How to issue broadcast commands in RS485 multi-point.

STP Pump Command List Reference

A comprehensive list of available commands and their functions.

STP Pump ReadMeas Command

Command to read the measured rotational speed of the pump.

STP Pump Control Commands (StartStopReset)

Commands for START, STOP, and RESET operations.

STP Pump ReadFailMess Command

Command to read detected error messages.

STP Pump ReadModFonct Command

Command to read pump operation mode and detected errors.

STP Pump ReadVersion Command

Command to read the software version of the pump components.

STP Pump ReadCounters Command

Command to read serial number, hour counter, and start counter.

STP Pump ReadSetPoint Command

Command to read speed set point and TMS temperature settings.

STP Pump ReadMotorTemp Command

Command to read the measured motor temperature.

STP Pump ReadStatus Command

Command to read various settings like remote mode and TMS function.

STP Pump ReadEvents Command

Command to read the error record with detection time.

STP Pump SetSpeedSetPoint Command

Command to change the pump's speed set point.

STP Pump ReadSpeedSetPoint Command

Command to read the pump's speed set point value.

STP Pump ReadModFonctWithWarning Command

Command to read operation mode, errors, and warnings.

STP Pump ReadMeasValue Command

Command to read TMS temp, motor temp, current, speed, and control unit temp.

STP Pump ReadOptionFunc Command

Command to read setting values for input port, warning, and timeout.

STP Pump SetOptionFunc Command

Command to change setting values for input port, warning, and timeout.

STP Pump ReadCondition Command

Command to read the pump model and damage point.

STP Pump ReadEventsWithTime Command

Command to read the error record with associated time information.

STP Pump Link and Display Unit

STP-Link Software Utility Overview

Overview of the STP-Link Windows application and its functions.

STP Pump iDT-001 Display Unit

Information about the iDT-001 display unit and its features.

STP Pump Safety Functions and Troubleshooting

STP Pump General Safety Functions

General introduction to the pump's safety functions.

STP Pump Power Failure Behavior

Explains how the pump behaves during a power failure.

STP Pump Operation After Power Recovery

Procedures for operating the pump after power is restored.

STP Pump Magnetic Bearing Abnormalities

Describes potential issues with the magnetic bearing.

STP Pump Excessive Vibration Faults

Explains causes and effects of excessive vibration.

STP Pump Motor Driver Overload Faults

Details what happens when the motor driver is overloaded.

STP Pump Motor Overheating Faults

Explains motor overheating issues.

STP Pump Control Unit Overheating Faults

Explains control unit overheating issues.

STP Pump Overspeed Faults

Describes pump behavior during overspeed conditions.

STP Pump TMS Unit Abnormalities

Explains abnormalities related to the TMS unit.

STP Pump Warning System Overview

Explains the warning system and indicators.

STP Pump Warning Function Indicators

Details the warning function and how it's indicated.

STP Pump Warning Function Contents

Explains the specific warning conditions.

STP Pump Warning Function Settings

How to enable/disable and configure warning functions.

STP Pump Troubleshooting After Failure

Guide for troubleshooting after a failure event.

STP Pump Troubleshooting After Power Failure

Recommended procedure after a power failure.

STP Pump Troubleshooting After Other Errors

Troubleshooting steps after other types of errors.

STP Pump General Troubleshooting Guide

General troubleshooting section covering failure indications and error lists.

Interpreting STP Pump Red FAILURE LED

Explains the meaning of the red FAILURE LED indications.

Interpreting STP Pump Green FAILURE LED

Explains the meaning of the green FAILURE LED indication.

Troubleshooting No FAILURE LED Indication

Troubleshooting for scenarios where the FAILURE LED is not illuminated.

STP Pump Maintenance and Inspection

General STP Pump Maintenance and Inspection

General precautions and procedures for maintenance and inspection.

STP Pump Cleaning Procedures

Details the method for cleaning the STP pump and its components.

Inspecting STP Pump Deposit Accumulation

Instructions for inspecting and dealing with deposit accumulation.

STP Pump Overhaul Recommendations

Recommended maintenance intervals for different process applications.

Transporting STP Pump for Repair or Overhaul

Instructions and warnings for safely transporting the pump for service.

STP Pump Storage and Disposal

STP Pump Long-Term Storage Guidelines

Precautions and guidelines for storing the STP pump long-term.

STP Pump Disposal Procedures

Instructions and warnings for safely disposing of the STP pump.

STP Pump Service, Spares, and Accessories

Edwards Service, Spares, and Accessories Introduction

Information on obtaining Edwards products, spares, and accessories.

Edwards Service Network and Options

Details the Edwards service network and available options.

STP Pump Replacement Spare Parts

Information on replacement parts like touch down bearings and fans.

Available Accessories for STP Pump

Lists available accessories for the STP pump.

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