STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% Vf% *++,-%&./
INSTALLATION
)%
3.5 Installation of the power unit
MGND*O!%
%
U->27-%"A%20;%"<+12:3-+%208%3-2#-%-0",?/%+62:-%1"%40+1233%1/-%:2<3-+%>41/",1%<-0840?%1/-9%
-=:-++4#-3;%>/-0%40+123340?%1/-%CDE%6,96$%
C-:,7-%1/-%6">-7%,041%,+40?%1/-%+:7->%/"3-+%KV%r%@V5%8-61/%aL%"0%1/-%<"11"9$%%
H-A-7%1"%C-:14"0%)$&$(5%e*0+1233214"0%27-2e%208%3-2#-%-0",?/%+62:-$%%
%
%
Y4?,7-%)[%.%Y4=-8%+:7->%/"3-%6"14"0%A"7%1/-%6">-7%,041%
%
Y4=-8%+:7->%/"3-%6"+414"0
V.@V5%8-61/%a
Y4=-8%6"+414"0