STP-iXA2205 Series Turbomolecular Pump
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SERIAL COMMUNICATION PROTOCOL
5.4.14 ReadModFonctWithWarning
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Parameter Item Data format Remark
&% 3,>9%"9-8@<4"A%>":-% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
1--%2@J?-%C0%
7%
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2/-%A,>J-8%"F%-88"8+%:-<-=<-:% (.J4<+%/-[@:-=4>@?%
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a7% X@?,-%="88-+9"A:4AG%<"%</-%-88"8%>-++@G-%4+%<8@A+>4<<-:$%O+--%2@J?-%CE%@A:%2@J?-%C0P%
2/-%8-=-A<%-88"8%/@+%</-%?@8G-+<%9@8@>-<-8%A,>J-8$%Z/-A%</-%A,>J-8%"F%-88"8+%J-4AG%:-<-=<-:%4+%,A:-8%</-%>@[4>,>%
A,>J-8I%</-%#@?,-%"F%9@8@>-<-8%</@<%4+%?@8G-8%</@A%</-%A,>J-8%"F%-88"8+%J-4AG%:-<-=<-:%4+%+-<%<"%'$%