Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &&0% *++,-%&./%
0
SERIAL COMMUNICATION PROTOCOL
5.4.7 ReadCounters
R,A=<4"Ak%B-@:+%+-84@?%A,>J-8I%/",8%=",A<-8%@A:%+<@8<%=",A<-8$%
28@A+>4++4"A%F8@>-k%
3T.m1*U% 1<[% '% ' &% n% =% d<[ MBT %
1*U.m3T% % % % % % % % % 6=N
%
3T.m1*U% % % % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% 19% =% 3@8@>-<-8%&%<"%7C% d<[ MBT %
%
Parameter Item Data format Remarks
&%<"%&'% T"A<8"?%,A4<%+-84@?%A,>J-8% E.J4<+%61T**%=/@8@=<-8% %
&&%<"%7'% 3,>9%+-84@?%A,>J-8% E.J4<+%61T**%=/@8@=<-8% %
7&% 3,>9%/",8%=",A<-8%
OVA4<k%>4A,<-P%
C7.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
77% T"A<8"?%,A4<%/",8%=",A<-8%
OVA4<k%>4A,<-P%
C7.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
7C% 1<@8<%=",A<-8% C7.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
%
d[@>9?-k%
T"A<8"?%,A4<%+-84@?%A,>J-8% k%&7CE0%
3,>9%+-84@?%A,>J-8% k%S`()6%
3,>9%/",8%=",A<-8% k%''''''CT
/-[
%j%S'%>4A,<-+%j%&%/",8%
T"A<8"?%,A4<%/",8%=",A<-8% k%'''''7(T
/-[
%j%S07%>4A,<-+%j&'%/",8+%@A:%07%>4A,<-+%
1<@8<%=",A<-8% k%''''''SE
/-[
%j%&''%<4>-+%
%
3@8@>-<-8% &% 7% C% E% 0% S% `% ( ) &' && &7 &C &E &0 &S &` &(% &)% 7'%
61T**% &% 7% C% E% 0% % % S ` ( ) 6 % %
_d5% C&% C7% CC CE% C0% 7'% 7'% 7' 7' 7' CS C` C( C) E& 7' 7' 7'% 7'% 7'%
%
3@8@>-<-8% 7&% 77% 7C%
61T**% '% '% '% '% '% '% C% T ' ' ' ' ' 7 ( T ' '% '% '% '% '% S E
_d5% C'% C'% C' C'% C'% C'% CC% EC C' C' C' C' C' C7 C( EC C' C'% C'% C'% C'% C' CS CE
%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English