STP-iXA2205 Series Turbomolecular Pump
Nov. 10 19 Issue 1-h
TECHNICAL DATA
2
Ǿ
㩩
㩩
$
Ǿ#
%
'
&
)
*
(
No. Item Description
1 Height of water cooling port
2 DC cable
3 Control unit
4 Height of the purge port
5 Outlet port flange KF40
6 Fixed screw hole for legs 4-M10 depth 20
7 Purge port KF10
8 Cooling water port 2-Rc1/4
9 Power unit
Figure 11 - External appearance of STP-iXA2205CIP: VG250/ISO250F/ICF305
Inlet
port
flange
VG250 ISO250F ICF305
㱢A
350 335
305
B 312 322 352
C 18 16* 28
D 235 245 275
E 540 550 580
F 551 561 591
G 281 291 321
H 283 293 323
* ISO250F: C=15
(with torque reduction mechanism)