Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% [g% *++,-%&./%
INSTALLATION
)%
3.12 Attaching a baking heater
%
FGH!*!I%
%
D/-%+,7A2:-+%"A%1/-%CDE%6,96%208%41+%6-746/-723%-W,469-01%>433%<-:"9-%-=17-9-3;%
/"1%>/-0%6-7A"7940?%<2B40?$%!P^PH%1",:/%1/-9%>41/%<27-%/208+$%
%
MGND*O!%
%
M/-:B%1/-%721-8%#"312?-%"A%1/-%<2B40?%/-21-7%<-A"7-%,+-$%D/-%720?-%"A%1/-%2#2432<3-%#"312?-%"A%1/-%
<2:B40?%/-21-7%K"614"023%2::-++"7;L%4+%84+632;%#"312?-%r&'%\$%
%
MGND*O!%
%
JO%!OD%2663;%-=:-++4#-%A"7:-%1"%1/-%:2<3-%A"7%1/-%<2B40?%/-21-7$%
%
MGND*O!%
%
F408%1/-%<2B40?%/-21-7%27",08%1/-%+,7A2:-%"A%1/-%CDE%6,96%14?/13;$%*A%1/-%<2B40?%/-21-7%4+%0"1%
>",08%14?/13;5%1/-%3""+-%6271+%>433%"#-7/-21$%
*0+1233%1/-%<2B40?%/-21-7%K"614"023%2::-++"7;L%0-27%1/-%403-1%6"71%A320?-%40%1/-%6-749-1-7%"A%1/-%
-0#-3"6-$%K+--%Y4?,7-%V)L%
E7":,7-%67"1-:14#-%6271+%A"7%1/-%<2B40?%/-21-75%+,:/%2+%20%-271/%3-2B2?-%<7-2B-7%"7%A,+-+%>/-0%,+40?%
1/-%<2B40?%/-21-7$%
%
Y4?,7-%V)%.%U2B40?%/-21-7%40+1233214"0%6"+414"0%
%
U2B40?%/-21-
7

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English