STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% )(% *++,-%&./%
0%
SERIAL COMMUNICATION PROTOCOL
28@A+>4++4"A%F8@>-%;/-A%@%>-++@G-%-[=--:+%700%=/@8@=<-8+%OA%j%700I%>ij700I%N%j%</-%A,>J-8%"F%
<8@A+>4++4"A%J?"=N+Pk%
R48+<% % &% 7% C% E% 0%
%0]A%0]A]&0]A]7%
c?"=N% 61T**% 1<[ '% '% &% T&
&
%T&
A
%d<J%MBT%
1-="A:% % &% 7% C% E% 0% %0]A%0]A]&0]A]7%
c?"=N% 61T**% 1<[ '% '% 7% T7
&
%T7
A
%d<J%MBT%
R4A@?% % &% 7% C% E% 0% %0]>0]>]&0]>]7%
c?"=N% 61T**% 1<[ N% TN
&
%TN
>
%d<[%MBT%
%
e1<[e%4+%,+-:%@+%@%+<@8<%=/@8@=<-8%"F%-@=/%<8@A+>4++4"A%J?"=Nl%ed<Je%4+%,+-:%@+%@A%-A:%=/@8@=<-8%"F%</-%
<8@A+>4++4"A%J?"=N%;4</%@%>-++@G-%"F%700%=/@8@=<-8+l%ed<[e%4+%,+-:%@+%@A%-A:%=/@8@=<-8%"F%</-%F4A@?%
<8@A+>4++4"A%J?"=N%O</-%-A:%=/@8@=<-8%"F%</-%<8@A+>4++4"A%F8@>-P$%
%
5.3.3 Control command (in the RS232/RS485 single point connection)
6% ="A<8"?% =">>@A:% 4+% ,+-:% ;/-A% <8@A+>4<<4AG% @% 9,>9%"9-8@<4"A% =">>@A:+% @A:% @% +-<<4AG% =/@AG-%
=">>@A:+%<"%</-%1*U$%2/-%F48+<%=/@8@=<-8%"F%</-%="A<8"?%=">>@A:%4+%e19e%O@%+9@=-%=/@8@=<-8I%_d5%
=":-%e7'ePI%@A:%+,==--:4AG%=/@8@=<-8+%@8-%61T**%=/@8@=<-8+%="88-+9"A:4AG%<"%</-%8-+9-=<4#-%F,A=<4"A%
=":-%@A:%9@8@>-<-8$%
19% T_B% T
&
%T
7
%% % %%T
A
%
%
T_Bk%R,A=<4"A%=":-%=/@8@=<-8I%T
&
%<"%T
A
k%3@8@>-<-8$%
3@8@>-<-8%OF8">% T
&
%<"%T
A
P% +-8#-+% @+% &S% J4<+%+4GA-:% /-[@:-=4>@?% #@?,-% =":-:%61T**% <-[<$% Z/-A% @%
>-++@G-%O@%+9@=-%=/@8@=<-8I%@%F,A=<4"A%=":-I%@A:%9@8@>-<-8P%-[=--:+%700%=/@8@=<-8+I%4A9,<%e19e%@A:%
T_B%<"%</-%<"9%<8@A+>4++4"A%J?"=N%"A?K%O</-%F48+<%<8@A+>4++4"A%J?"=N%"F%</-%<8@A+>4++4"A%F8@>-P$%*<%4+%A"<%
A-=-++@8K%<"%4A9,<%</->%<"%</-%+-="A:%@A:%+,==--:4AG%<8@A+>4++4"A%J?"=N+$%
2/-% 1*U% 8-<,8A+% </-% @=NA";?-:G>-A<% 8-+9"A+-% =/@8@=<-8% ege% ;/-A% </-% ="A<8"?% =">>@A:% 4+%
98"=-++-:% A"8>@??K$%*F% A"<I% </-% 1*U% 8-<,8A+% </-% A"A.@=NA";?-:G>-A<% 8-+9"A+-%=/@8@=<-8% ehe% @A:% C%
=/@8@=<-8+%"F%</-%A"A.@=NA";?-:G>-A<%=":-%@8-%@::-:%<"%ehe$%
28@A+>4++4"A%F8@>-%;/-A%:@<@%4+%<8@A+>4<<-:%<"%"A-%J?"=N%O@%>-++@G-%4+%?-++%</@A%70S%=/@8@=<-8+Pk%
Q-+4GA@<-%</-%="A<8"?%=">>@A:%"A%</-%3T$%
% % % % % i.%M-++%</@A%70S%=/8$%.m % % %
3T.m1*U%
1<[% '% ' &% 19% T_B T
&
%T
A
d<[ MBT %
1*U.m3T%
6=N%"8%!@N%
6?;@K+%@++4GA%?-++%</@A%70E%=/@8@=<-8+%OAi%70EP%<"%</-%9@8@>-<-8%+"%</@<%</-%>-++@G-%4+%?-++%</@A%
70S%=/@8@=<-8+$