Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &\)% *++,-%&./%
0
SAFETY FUNCTIONS
7.6 Troubleshooting
7.6.1 Indication of "FAILURE" LED (red)
1/-%<A;+/6>D%4;::-7>%"<%:/-%GXF*VYJKG%VKW%Q7-8R%86<<-7+%8-4->86>D%">%:/-%:=4-%"<%;@>"75;A6:=B-77"7$%
C/->%:9"%"7%5"7-%<;6A,7-+%;7-%8-:-?:-8%+65,A:;>-",+A=E%;%/6D/.476"76:=%<;6A,7-%6+%6>86?;:-8$%FA+"E%:/-%
<;6A,7-% +6D>;A% 6+% ",:4,:% <7"5% :/-% GHI% JKLM1KG% ?">>-?:"7$% *<% ;>% ;@>"75;A6:=B-77"7% 6+% <",>8E% :;N-%
5-;+,7-+%6>%;??"78;>?-%96:/%1;@A-%\O%:"%1;@A-%T&$%
No
Failure
"FAILURE" LED
indication
Priority
1
3"9-7%X;6A,7-%
M#-7+4--8E%;>8%":/-7%
2:-;8=%7-8%
`6D/%
2
LM1MJ%M#-7/-;:%
]!1%M#-7/-;:%
(%<A;+/-+%6>%7-8%
%
3
WJP%M#-7A";8% I%<A;+/-+%6>%7-8% %
4
W6+:,7@;>?-% &%<A;+/%6>%7-8% V"9%
1;@A-%\T%.%376"76:=%"<%<;6A,7-%+6D>;A%
&%?=?A-
W6+:,7@;>?-
䋨&%<A;+/%6>%7-8䋩
MXX%
㸣X;6A,7-%8-:-?:6">
%GXF*VYJKG%VKW%6>86?;:6">
%HI%JKLM1K%",:4,:
M!
WJP% M#-7A";8
䋨I% <A;+/-+% 6>% 7-8䋩
LM1MJ% M#-7/-;:
]!1% M#-7/-;:
䋨(% <A;+/-+% 6>% 7-8䋩
]"77-+4">86>D%:"%
<;6A,7-%:=4-
MXX%
MXX%
M!
M!
M!
MXX
XF*VYJK% !$M% MY1
Q&\RZQ((R
MXX%
M!
3"9-7% X;6A,7-
M#-7+4--8
䋨+:-;8=% 6>% 7-8䋩
M!
MXX
XF*VYJK% !$]% MY1
Q&TRZQ((R
%
X6D,7-%OI%.%X;6A,7-%",:4,:%
Note: The STP-Link (optional accessory) and the display unit (optional accessory) display an error
as a message. Also, the errors being detected can be read via serial communication.

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English