Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &&)% *++,-%&./%
0
SERIAL COMMUNICATION PROTOCOL
%
Parameter Item Data format Remarks
&% 2/-%A,>J-8%"F%
ed88"8%B-="8:e%
(.J4<+%/-[@:-=4>@?%
=":-:%61T**%
V9%<"%&'%-88"8+%
7%<"%&&% d88"8%B-="8:%&%<"%
d88"8%B-="8:%&'%
(.J4<+%/-[@:-=4>@?%
=":-:%61T**%
a&%
a&% X@?,-%="88-+9"A:4AG%<"%</-%-88"8%>-++@G-%4+%<8@A+>4<<-:%O8-F-8%<"%2@J?-%CE%@A:%2@J?-%C0P$%2/-%>"+<%8-=-A<%-88"8%/@+%</-%
+>@??-+<%9@8@>-<-8%A,>J-8$%Z/-A%</-%A,>J-8%"F%-88"8+%J-4AG%:-<-=<-:%4+%,A:-8%</-%>@[4>,>%A,>J-8I%</-%#@?,-%"F%
9@8@>-<-8%</@<%4+%?@8G-8%</@A%</-%A,>J-8%"F%-88"8+%/@+%J--A%:-<-=<-:%4+%+-<%<"%'$%
%
d[@>9?-k%
Z/-A%C%-88"8+%/@#-%J--A%:-<-=<-:%4A%</-%9@+<l%
%%2/-%A,>J-8%"F%ed88"8%B-="8:e% k%'C
/-[
%j%C%-88"8+%
%%d88"8%B-="8:%&% k%'R
/-[
%j%&0%j%Q4+<,8J@A=-%5J%
%%d88"8%B-="8:%7% k%'Q
/-[
%j%&C%j%Q4+<,8J@A=-%5/%
%%d88"8%B-="8:%C% k%&7
/-[
%j%&(%j%2$T@J?-%Q4+="AA-=<-:%
%%d88"8%B-="8:%E%<"%&'% k%''
/-[
%j%!"%-88"8%8-="8:-:%
%
3@8@>-<-8% &% 7% C% E% 0% S% `% (% )% &'% &&%
61T**% '% C% ' R% '% Q% & 7 ' ' ' ' ' ' ' ' ' '% '% '% '% '
_d5% C'% CC% C' ES% C'% EE% C& C7 C' C' C' C' C' C' C' C' C' C'% C'% C'% C'% C'
%
5.4.12 SetSpeedSetPoint
R,A=<4"Ak%T/@AG-+%</-%e19--:%1-<%3"4A<e%#@?,-$%2/4+%#@?,-%=@A%J-%=/@AG-:%</-%8@AG-%F8">%&CI0''%<"%
7`I'''%89>$%2/-%</8-+/"?:%#@?,-%"F%</-%4??,>4A@<4"A%9@<<-8A%"F%</-%eBH262*H!e%MdQ%4+%F4[-:$%*<%4+%A"<%
=/@AG-:%-#-A%4F%</-%+-<<4AG%#@?,-%"F%</-%8"<@<4"A@?%+9--:%4+%=/@AG-:$%
28@A+>4++4"A%F8@>-k%
3T.m1*U% 1<[% '% ' &% 19% /%
3@8@>-<-8%&% d<[ MBT %
1*U.m3T% % % % % % % % % % 6=N
%
3T.m1*U% % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% g% d<[ MBT %
%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English