Edwards STP-iXA2205 Series - Connecting STP Pump to Semiconductor Equipment; STP Pump Power Connection to Equipment; STP Pump Emergency Off (EMO) Circuit

STP-iXA2205 Series Turbomolecular Pump
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3.14 Connecting to semiconductor equipment
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3.14.1 Connecting to power
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3.14.2 Emergency off circuit (EMO circuit)
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Note: Procure the main disconnect device and the EMO circuit at your company.
Use the main disconnect device which is lockable only in the de-energised position.
Locate the main disconnect device and the EMO button in the place where personnel are
readily accessible and are not exposed to any hazards during operation.