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STP-iXA2205 Series Turbomolecular Pump

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OPERATION

4.1.2 How to introduce a purge gas

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4.2 Cooling the STP pump

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4.2.1 Water-cooling method

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Note: Refer to Section 2.3, "Condition for the water-cooling unit" for the water-cooling unit.

Edwards STP-iXA2205 Series User Manual

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