Edwards STP-iXA2205 Series - Introducing Purge Gas to STP Pump; Cooling the STP Pump During Operation; STP Pump Water-Cooling Method Details

STP-iXA2205 Series Turbomolecular Pump
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4.1.2 How to introduce a purge gas
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4.2 Cooling the STP pump
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4.2.1 Water-cooling method
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Note: Refer to Section 2.3, "Condition for the water-cooling unit" for the water-cooling unit.