STP-iXA2205 Series Turbomolecular Pump
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INSTALLATION
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3.1.3 Bench
G%<-0:/%9,+1%<-%67-627-8%<;%1/-%:,+1"9-7%1"%+-:,7-%1/-%CDE%6,96$%D/-%+/26-%208%+4b-%"A%1/-%
<-0:/%84AA-7%8-6-0840?%,6"0%1/-%1;6-%"A%CDE%6,96$
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FGH!*!I%
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O<-;%1/-%+2A-1;%40+17,:14"0+%?4#-0%<-3">%208%12B-%0"1-%"A%2667"67421-%67-:2,14"0+$%%
*A%;",%8"%0"15%;",%:20%:2,+-%40c,7;%1"%6-"63-%208%8292?-%1"%-W,469-01$%
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FGH!*!I
D/-%CDE%6,96%4+%67"#48-8%>41/%2%/4?/.+6--8%7"1"7$%G0;%401-7023%2<0"792341;d-77"7%
92;%7-+,31%40%2%c,96%40%7"1214"023%1"7W,-%3-2840?%1"%6-7+"023%40c,7;%"7%6-746/-723%
-W,469-01%8292?-$%
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FGH!*!I%
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J-+4?0%208%+-:,7-%1/-%<-0:/%A"7%1/-%CDE%6,96%+"%1/21%41%:20%>41/+1208%1/-%
92=49,9%1"7W,-%?-0-721-8%8,-%1"%1/-%"::,77-0:-%"A%20%2<0"792341;d-77"7$%H-A-7%1"%
C-:14"0%)$V$)5%eC-:,7-%1/-%CDE%6,96e%A"7%2<0"7923%1"7W,-$%
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MGND*O!%
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C-:,7-%1/-%:,+1"9-7.67-627-8%<-0:/%208%1/-%#2:,,9%-W,469-01%"0%1/-%A3""7%"7%6-746/-723%
-W,469-01%208%"1/-7%-W,469-01%40%2::"7820:-%>41/%1/-%:,+1"9-7%26634:214"0$%!P^PH%9"#-%1/-9%
>/43-%1/-%CDE%6,96%4+%40%"6-7214"0$%
M"0A479%1/-%849-0+4"0+%<;%1/-%-=1-7023%266-2720:-%"A%1/-%CDE%6,96%>/-0%8-+4?040?%1/-%<-0:/$%
D/-%<"31%92;%0"1%<-%2<3-%1"%<-%40+-71-8%A7"9%1/-%3">-7%+48-%"A%1/-%403-1%6"71%2::"7840?%1"%1/-%+/26-%"A%
1/-%403-1%6"71%A320?-$%
Note: When the external appearance of the STP pump is not in the manual, contact Edwards.
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3.1.4 Insulation test
MGND*O!%
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D/-%#274+1"7%A"7%1/-%6">-7%+,663;%340-%67"1-:14"0%4+%40+1233-8%40%1/-%6">-7%,041$%JO%!OD%6-7A"79%1/-%
40+,3214"0%1-+1%>41/%1/-%#274+1"7%40+1233-8$%J"40?%+"%92;%7-+,31%40%67"8,:1%8292?-%1"%1/-%6">-7%,041$%
JO%!OD%6-7A"79%20%40+,3214"0%1-+1%"0%1/-%6">-7%,041$%F/-0%6-7A"7940?%1/-%40+,3214"0%1-+1%"0%;",7%
-W,469-015%-0+,7-%1/21%;",%84+:"00-:1%1/-%6">-7%,041%A7"9%1/-%-W,469-01%1/21%4+%1"%<-%40+,3214"0%
1-+1-85%+"%1/21%1/-%1-+1%#"312?-%4+%0"1%26634-8%1"%1/-%6">-7%,041$%
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