STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% )a% *++,-%&./%
INSTALLATION
)%
Y4?,7-%([%+/">+%1/-%A7"01%620-3%"A%1/-%6">-7%,041$%%
219'4
:562.+0-
%
&% eEOFPHe%SPJ% (% eCDE.S*!]e%:"00-:1"7%
Y4?,7-%([%.%E">-7%,041%KA7"01%620-3L%
Item Description Function
&% eEOFPHe%SPJ% KI7--0%SPJL%S4?/1+%>/43-%1/-%6">-7%4+%O!%
(% eCDE.S*!]e%:"00-:1"7%
K`&VL%
Y"7%1/-%:"99,04:214"0%:2<3-%"A%1/-%CDE.S40B%K"614"023%
2::-++"7;L%"7%1/-%84+632;%,041%4JD.''&%K"614"023%2::-++"7;L$%
D/-+-%"614"023%2::-++"74-+%:20%"6-721-%1/-%CDE%6,965%
:"0A479%1/-%"6-7214"0%+121-5%"7%:/20?-%#274",+%+-1140?+$%
D2<3-%a%.%E">-7%,041%A7"01%620-3%A,0:14"0%
&%
(%