Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
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SAFETY FUNCTIONS
7.1.8 Overspeed
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Note: The flashing pattern of the "FAILURE" LED (red) indicates the type of failure.
Refer to Section7.6, "Troubleshooting" for details.
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7.1.9 Abnormality/Error in the TMS unit (for use with the TMS unit)
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Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English