Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &'`% *++,-%&./%
0
SERIAL COMMUNICATION PROTOCOL
5.4.2 ReadMeas
R,A=<4"Ak% % B-@:+%</-%>-@+,8-:%8"<@<4"A@?%+9--:$%
28@A+>4++4"A%F8@>-k%
3T.m1*U% 1<[% '% ' &% n% Q d<[ MBT %
1*U.m3T% % % % % % % % % 6=N
%
3T.m1*U% % % % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% 19% Q 3@8@>-<-8%&%<"%7 d<[ MBT %
%
Parameter Item Data format Remarks
&%
W1K+<->%8-+-8#@<4"AY% 0S.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
7%
U-@+,8-:%8"<@<4"A@?%+9--:%
OVA4<k%_oP% %
&S.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
%
d[@>9?-k%
U-@+,8-:%8"<@<4"A@?%+9--:k%'&T7
/-[%
j%E0'%_o%j%7`I'''%89>%
3@8@>-<-8% &% 7%
61T**%
a&% a&% a& a&% a&% a&% a& a& a& a& a& a& a& a&
'&T%7%
_d5% % % % % % % C' C& EC% C7%
a&% 1K+<->%8-+-8#@<4"A%
%
5.4.3 Command
R,A=<4"Ak%1-A:+%</-%9,>9%"9-8@<4"A%=">>@A:+%126B2I%12H3%@A:%Bd1d2$%2/-+-%=">>@A:+%@8-%
#@?4:%"A?K%;/-A%J-4AG%+-A<%<"%</-%+-84@?%9"8<%;/4=/%4+%+-<%@+%</-%4A9,<%"9-8@<4"A%9"8<$%B-F-8%<"%1-=<4"A%
1-=<4"A%0$E$&`I%e1-<H9<4"AR,A=e%F"8%</-%+-<<4AG%>-</":%"F%</-%4A9,<%"9-8@<4"A%9"8<$%
28@A+>4++4"A%F8@>-k% %
3T.m1*U% 1<[% '% ' &% 19% d
3@8@>-<-8%& d<[ MBT %
1*U.m3T% % % % % % % % % % 6=N
%
3T.m1*U% % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% g% d<[ MBT %

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English