STP-iXA2205 Series Turbomolecular Pump
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SERIAL COMMUNICATION PROTOCOL
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Parameter Item Data format Remark
&% U"<"8%<->9-8@<,8-%
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=":-:%61T**%
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3@8@>-<-8% &%
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5.4.10 ReadStatus
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3T.m1*U% 1<[% '% ' &% n% F% d<[ MBT %
1*U.m3T% % % % % % % % % 6=N
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3T.m1*U% % % % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% 19% F% 3@8@>-<-8%&%<"%E% d<[ MBT %
Parameter Item Data format Remarks
&% B->"<-%>":-%+-<<4AG% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
B-F-8%<"%2@J?-%C`%
7% 2U1%F,A=<4"A%+-<<4AG% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
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C% W1K+<->%8-+-8#@<4"AY% (.J4<+%/-[@:-=4>@?%
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E% d>-8G-A=K%#-A<%#@?#-%+-<<4AG (.J4<+%/-[@:-=4>@?%
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