Edwards STP-iXA2205 Series - STP Pump Vacuum Piping Precautions; STP Pump Vacuum Piping Connection Method

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% [[% *++,-%&./
INSTALLATION
)%
3.9 Precautions of vacuum piping
MGND*O!%
%
JO%!OD%"6-0%1/-%CDE%6,96%1/7",?/%1/-%A320?-%1"%219"+6/-74:%247%>/43-%1/-%CDE%6,96%4+%
7,0040?$%*A%219"+6/-74:%247%A3">+%401"%1/-%CDE%6,965%41%92;%0"1%A,0:14"0%0"79233;$%
*0+1233%1/-%#23#-%1"%4+"321-%6,7?-%?2+%!
(
%"7%:""340?%>21-7%KS":B",1dD2?",1L%21%;",7%:"9620;$%
J-6-0840?%,6"0%1/-%1;6-%"A%1/-%<2:B40?.6,96%,+-85%219"+6/-74:%247%92;%7-#-7+-%A3">%401"%1/-%CDE%
6,96%>/-0%1/-%<2:B40?.6,96%+1"6+$%
G112:/%2%#2:,,9%#23#-%1"%1/-%94883-%"A%1/-%64640?%<-1>--0%1/-%CDE%6,96%",13-1%6"71%A320?-%208%1/-%
<2:B40?.6,965%208%:3"+-%1/-%#2:,,9%#23#-%>/-0%1/-%<2:B40?.6,96%+1"6+$%
Note: Abnormal noise or excessive vibration failure (Disturbance) caused by rotor incline toward
outlet port may be generated when performing roughing vacuum depending upon pumping
speed of the backing-pump, chamber capacity, or piping length. When the failure is detected,
perform the RESET operation.
*0%"78-7%1"%3-1%1/-%CDE%6,96%<740?%41+%6-7A"7920:-%401"%A,33%632;5%A"33">%1/-%67-:2,14"0+%<-3">Q%
&$% U-%:27-A,3%0"1%1"%+:721:/%1/-%A320?-%"A%1/-%CDE%6,96%208%#2:,,9%-W,469-01+$%U-A"7-%40+123340?%
1/-%CDE%6,965%:/-:B%>/-1/-7%"7%0"1%1/-7-%27-%+:721:/-+%"0%1/-%+,7A2:-$%
($% N+-%+1--3%"7%23,940,9%1,<-+%>41/%2%3">%?2+%3"++%1"%:"00-:1%1/-%#2:,,9%-W,469-01%1"%1/-%CDE%
6,96$%
)$% D2B-%9-2+,7-+%A"7%940494b40?%3-2B2?-$%*1%4+%23+"%0-:-++27;%1"%8-?7-2+-%1/-%1,<-+%2+%7-?,3273;%2+%
6"++4<3-%1"%B--6%1/-%?2+%3"++%2+%3">%2+%6"++4<3-$%
V$% D/-7-%4+%2%7-:"99-08-8%<2:B40?.6,96%"A%6,9640?%+6--8$%KH-A-7%1"%C-:14"0%($&5%eCDE%6,96%
+6-:4A4:214"0+e$%T">-#-75%1/-%67-++,7-%21%1/-%403-1%208%",13-1%6"71+%#274-+%>41/%1/-%A3">%721-%"A%?2+5%
:262:41;%"A%1/-%#2:,,9%-W,469-015%3-0?1/%208%921-7423%"A%1/-%64640?$%
C-3-:1%2%<2:B40?.6,96%40%2::"7820:-%>41/%1/-%:262:41;%208%+127140?%9-1/"8%K+49,3120-",+%
+127140?5%+127140?%2A1-7%?-0-72140?%7",?/40?%#2:,,9L%+,412<3-%A"7%1/-%#2:,,9%-W,469-01%;",%,+-$%
[$% J-6-0840?%,6"0%1/-%1;6-%"A%1/-%<2:B40?.6,96%,+-85%"43%#26",7%92;%:"01294021-%1/-%40+48-%"A%
1/-%CDE%6,96$%C"9-%"43%#4+:"+41;%:",38%:2,+-%2%923A,0:14"0%>/-0%1/-7-%4+%2%+17"0?%7-#-7+-%A3">%
"A%"43$%D2B-%1/-%A"33">40?%9-2+,7-+%1"%-0+,7-%1/-%:"77-:1%A3">%"A%"43Q%
x%G112:/%2%#2:,,9%#23#-%1"%1/-%94883-%"A%1/-%64640?%<-1>--0%1/-%CDE%6,96%",13-1%6"71%A320?-%208%
1/-%<2:B40?.6,96$%
x%G112:/%20%2<+"7614"0%1726%28c2:-01%1"%1/-%#2:,,9%#23#-$%
%
3.9.1 Vacuum piping method
&$% G112:/%1/-%403-1%6"71%1"%1/-%/4?/%#2:,,9%+48-$%
KH-A-7%1"%C-:14"0%($&5%eCDE%6,96%+6-:4A4:214"0e%A"7%92=49,9%>"7B40?%67-++,7-L$%
($% G112:/%1/-%",13-1%6"71%1"%1/-%403-1%6"71%A320?-%"A%1/-%<2:B40?.6,96%K674927;%+48-%6,96L$%
KH-A-7%1"%C-:14"0%($&5%eCDE%6,96%+6-:4A4:214"0e%A"7%233">2<3-%<2:B40?%67-++,7-L$%