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STP-iXA2205 Series Turbomolecular Pump

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INSTALLATION

3.9 Precautions of vacuum piping

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Note: Abnormal noise or excessive vibration failure (Disturbance) caused by rotor incline toward

outlet port may be generated when performing roughing vacuum depending upon pumping

speed of the backing-pump, chamber capacity, or piping length. When the failure is detected,

perform the RESET operation.

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3.9.1 Vacuum piping method

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Edwards STP-iXA2205 Series User Manual

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