Edwards STP-iXA2205 Series - Page 64

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% [V% *++,-%&./%
INSTALLATION
)%
%
MGND*O!%
%
JO%!OD%632:-%/-2#;%"<c-:1+%"0%1/-%:2<3-+%"7%<-08%1/-9%-=:-++4#-3;$%C,66"71%-2:/%:2<3-%+"%2+%
0"1%1"%2663;%847-:1%A"7:-%1"%1/-%:"00-:1"7+%"7%1-794023+$%*A%20;%67"<3-9%"::,7+%40%:2<3-+5%:"00-:1"7+%
"7%1-794023+5%1/-%CDE%6,96%92;%0"1%A,0:14"0%0"79233;$%JO%!OD%2663;%#"312?-%1"%-2:/%:"00-:1"7%
640%208%JO%!OD%:2,+-%20;%+/"71.:47:,4140?%<-1>--0%640+$%*0+1233%:2<3-+%+"%1/21%6-7+"00-3%27-%0"1%
-=6"+-8%1"%74+B%"A%1746640?%"7%A23340?$%
%
&$% M"00-:140?%1/-%JM%:2<3-%
M"00-:1%1/-%+":B-1%+48-%"A%1/-%JM%:2<3-%1"%1/-%e`&%JM%EOFPHe%"0%1/-%:"017"3%,041%208%:"00-:1%1/-%
63,?%K640L%+48-%"0%1/-%6">-7%,041%1"%1/-%e`&(%JM%ONDENDe%"0%1/-%6">-7%,041$%
($% M"00-:140?%1/-%6">-7%K674927;%+48-L%:2<3-%
M"00-:1%1/-%6">-7%:2<3-%1"%1/-%e`&&%GM%EOFPHe%"0%1/-%6">-7%,041%7-27%620-3$%
%