Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &\(% *++,-%&./%
0
SAFETY FUNCTIONS
7.2 "WARNING" function
7.2.1 "WARNING" function
1/-%213%4,54%6+%47"#68-8%96:/%;%CFJ!*!b%<,>?:6">%9/->%;>%"#-7/;,A%6+%>--8-8%<"AA"96>D%;%+-A<.:-+:%
;+%+/"9>%6>%1;@A-%\I$%
1/-%:=4-%"<%9;7>6>D%6+%6>86?;:-8%@=%<A;+/6>D%4;::-7>%"<%:/-%GXF*VYJKG%VKW%Q"7;>D-R$%
C/->%:9"%"7%5"7-%9;7>6>D+%;7-%8-:-?:-8%+65,A:;>-",+A=E%;%/6D/.476"76:=%9;7>6>D%6+%6>86?;:-8$%FA+"E%
:/-%9;7>6>D%+6D>;A%6+%",:4,:%<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%
1/-% +-76;A%?"55,>6?;:6">E% :/-% 213.V6>N% Q"4:6">;A%;??-++"7=RE% "7% :/-% 86+4A;=% ,>6:% 6W1.''&% Q"4:6">;A%
;??-++"7=R%?;>%?"><675%:/-%-77"7%5-++;D-E%;>8%?/;>D-%:/-%+-::6>D+$%
J-<-7% :"% 2-?:6">% TE% G2-76;A% ]"55,>6?;:6">% 37":"?"AGE% :/-% 213.V6>N% "7% :/-% 86+4A;=% ,>6:% 6W1.''&%
*>+:7,?:6">%L;>,;A%"<%:/-%"4:6">;A%;??-++"76-+%<"7%8-:;6A+$%
No
Warning
"FAILURE" LED
indication
Priority
1
X67+:%W;5;D-%V656:%
2-?">8%W;5;D-%V656:%
Q1",?/%8"9>%@-;76>D%9;7>6>D%<,>?:6">R%
(%<A;+/-+%6>%"7;>D-% `6D/%
2
3,54%J,>%165-%M#-7%
Q3,54%7,>:65-%9;7>6>D%<,>?:6">R%
%
3
3,54%M#-7A";8%
Q3,54%"#-7A";8%9;7>6>D%<,>?:6">R%
I%<A;+/-+%6>%"7;>D-%
%
4
*5@;A;>?-%
QKS?-++6#-%65@;A;>?-%9;7>6>D%<,>?:6">R%
&%<A;+/%6>%"7;>D-% V"9%
1;@A-%\I%.%CFJ!*!b%<,>?:6">%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English