Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% )(% *++,-%&./%
INSTALLATION
)%
3.3 Name and function of each part
3.3.1 Name and function of the pump
D/-%CDE%6,96%40%Y4?,7-%((%4+%2%1;64:23%6,96%9"8-3$%H-A-7%1"%C-:14"0%(5%eDPMT!*MGS%JGDGe$%
%
%
%
KGL%CDE.4`G(('[MK^L% KGL%CDE.4`G(('[MEK^LdM*E%
Y4?,7-%((%.%M"0A4?,7214"0%"A%1/-%CDE%6,96%
Item Description Function
&% *03-1%6"71%A320?-% M"00-:1-8%1"%1/-%#2:,,9%-W,469-01%K21%1/-%/4?/%#2:,,9%+48-L$%
(% O,13-1%6"71%A320?-% M"00-:1-8%1"%1/-%403-1%6"71%+48-%"A%1/-%<2:B40?.6,96$%
)% E,7?-%6"71% *017"8,:-+%2%6,7?-%?2+$%
*0%"78-7%1"%67"1-:1%1/-%40+48-%"A%1/-%CDE%6,96%>/-0%6,9640?%
7-2:14#-%"7%:"77"+4#-%?2+-+$%
D/-%CDE%6,96%4+%8-34#-7-8%>41/%2%<320B%A320?-%2112:/-8%1"%1/4+%
6"71$%
V% M""340?%>21-7%6"71
%
K>21-7%:""340?%,041L%
M"00-:1-8%1"%1/-%CDE%6,96%:""340?%>21-7%646-$%%
[% M"017"3%,041% M"01240+%1/-%-3-:17"04:+%1/21%:"017"3%1/-%6,96$%H-A-7%1"%C-:14"0%
)$)$(5%e!29-%208%A,0:14"0%"A%1/-%:"017"3%,0415%A"7%8-1243+$%
a% E">-7%,041% D/-%6">-7%+,663;%4+%40:"76"721-8$%H-A-7%1"%C-:14"0%)$)$)5%e!29-%
208%A,0:14"0%"A%1/-%6">-7%,041e%A"7%8-1243+$%
_&%
J-6-0840?%,6"0%1/-%6,96%9"8-35%1/-%D@C%,041%K"614"023%2::-++"7;L%4+%0"1%2#2432<3-$%H-A-7%1"%C-:14"0%(5%eDPMT!*MGS%
JGDGe%A"7%9"7-%8-1243-8%40A"79214"0$%
D2<3-%)%.%E,96%A,0:14"0+%
&%
%
(%
%
[
)%
V%
&
%
(
%
[%
)%
V
)%
a%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English