Edwards STP-iXA2205 Series - STP Pump Magnetic Bearing Abnormalities; STP Pump Excessive Vibration Faults; STP Pump Motor Driver Overload Faults; STP Pump Motor Overheating Faults

STP-iXA2205 Series Turbomolecular Pump
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SAFETY FUNCTIONS
7.1.3 Abnormal state of magnetic bearing (Disturbance)
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7.1.4 Excessive vibration (Disturbance)
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Note: When the rotor contacts the touch down bearing, contact noise and rotational noise of the
touch down bearing are generated from the STP pump.
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7.1.5 Motor driver overload (DRV Overload)
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7.1.6 Overheating inside the STP pump (MOTOR Overheat)
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7.1.7 Overheating inside the control unit (CNT Overheat)
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