Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &\&% *++,-%&./%
0
SAFETY FUNCTIONS
7.1.3 Abnormal state of magnetic bearing (Disturbance)
]FY1*M!%
%
C/->%;>%;@>"75;A6:=B-77"7%"??,7+%6>%:/-%5;D>-:6?%@-;76>DE%?/-?N%:/-%213%4,54$%
*<%GXF*VYJKG%?;>>":%@-%7-A-;+-8%;<:-7%7-+-:%"4-7;:6">E%?">:;?:%2-7#6?-%"<<6?-$%
C/->% :/-% 5;D>-:6?% @-;76>D% 8"-+% >":% <,>?:6">% >"75;AA=% 8,-% :"% ;% @7-;N;D-% "<% :/-% 213% ?">>-?:6">%
?;@A-E%86+?">>-?:6">%"<%?">>-?:"7+%"7%;>=%;@>"75;A6:=B-77"7%"<%:/-%213%?">:7"A%?67?,6:E%:/-%7":"7%A;>8+%
">%:/-%:",?/%8"9>%@-;76>D%;>8%+:"4+$%1/-%GXF*VYJKG%VKW%Q7-8R%<A;+/-+E%;>8%;%<;6A,7-%+6D>;A%6+%",:4,:%
<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%
%
7.1.4 Excessive vibration (Disturbance)
C/->%+-76",+%#6@7;:6">%"7%5-?/;>6?;A%+/"?N%?;,+-+%:/-%7":"7%:"%?"5-%6>%?">:;?:%96:/%:/-%:",?/%8"9>%
@-;76>D%Q8,-%:"%-S:-7>;A%#6@7;:6">B654;?:E%6>:7,+6">%"<%;:5"+4/-7-E%<"7-6D>%5;::-7%6>:"%:/-%213%4,54E%
"7%7":"7%65@;A;>?-RE%;>8%:/-%+:;:-%A;+:+%<"7%;%?-7:;6>%4-76"8%"<%:65-E%:/-%213%4,54%8-?-A-7;:-+%;>8%
+:"4+$%
1/-%GXF*VYJKG%VKW%Q7-8R%<A;+/-+E%;>8%;%<;6A,7-%+6D>;A%6+%",:4,:%<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%
Note: When the rotor contacts the touch down bearing, contact noise and rotational noise of the
touch down bearing are generated from the STP pump.
%
7.1.5 Motor driver overload (DRV Overload)
C/->%:/-%213%4,54%8"-+%>":%;::;6>%:/-%7;:-8%+4--8%96:/6>%;447"S$%('%56>,:-+%;<:-7%+:;7:6>D%"7%9/->%
:/-% F]]KVKJF1*M!% +:;:-% 7-5;6>+% ,>?/;>D-8% 8,76>D% "4-7;:6">% <"7% ;447"S$% ('% 56>,:-+E% :/-% 213%
4,54%8-?-A-7;:-+%;>8%+:"4+$%
1/-%GXF*VYJKG%VKW%Q7-8R%<A;+/-+E%;>8%;%<;6A,7-%+6D>;A%6+%",:4,:%<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%
%
7.1.6 Overheating inside the STP pump (MOTOR Overheat)
C/->%:/-%:-54-7;:,7-%"<%:/-%5":"7%6>+68-%:/-%213%4,54%6+%"#-7/-;:-8%8,-%:"%;>%"#-7A";8E%:/-%213%
4,54%8-?-A-7;:-+%;>8%+:"4+$% %
1/-%GXF*VYJKG%VKW%Q7-8R%<A;+/-+E%;>8%;%<;6A,7-%+6D>;A%6+%",:4,:%<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%
%
7.1.7 Overheating inside the control unit (CNT Overheat)
C/->% :/-% :-54-7;:,7-% 6>+68-% :/-% ?">:7"A% ,>6:% 76+-+% 8,-% :"% ;% #->:6A;:6">% 5;A<,>?:6">E% -S:-7>;A% /-;:%
+",7?-E%<;6A,7-%"<%;>%;67.?""A6>D%<;>E%"7%":/-7%-#->:E%:/-%213%4,54%8-?-A-7;:-+%;>8%+:"4+$%
1/-%GXF*VYJKG%VKW%Q7-8R%<A;+/-+E%;>8%;%<;6A,7-%+6D>;A%6+%",:4,:%<7"5%:/-%GHI%JKLM1KG%?">>-?:"7$%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English