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Edwards STP-iXA2205 Series User Manual

Edwards STP-iXA2205 Series
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STP-iXA2205 Series Turbomolecular Pump
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SERIAL COMMUNICATION PROTOCOL
5.4.8 ReadSetPoint
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Parameter Item Data format Remarks
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5.4.9 ReadMotorTemp
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3T.m1*U% 1<[% '% ' &% n% -% d<[ MBT %
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3T.m1*U% % % % % % % % % % 6=N
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Edwards STP-iXA2205 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iXA2205 Series
CategoryWater Pump
LanguageEnglish

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