EasyManua.ls Logo

Edwards STP-iXA2205 Series - STP Pump Introduction and Standards; Scope and Definitions of STP Pump Manual

Edwards STP-iXA2205 Series
177 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &% ())*+%&,-%
INTRODUCTION
&%
1 INTRODUCTION
1.1 Scope and definitions
.-/)% 012*13% 45"#/6+)% /2)713317/"28% "4+517/"2% 126% 01/27+2129+% /2)75*97/"2)% :"5% 7-+% ;6<156)%
.*5="0"3+9*315%>*04%?1==5+#/17+6%7"%@A.>%4*04@%7-5"*B-"*7%7-/)%012*13C$%D"*%0*)7%*)+%7-+%A.>%
4*04%1)%)4+9/:/+6%/2%7-/)%012*13$%
.-+% 45"9+6*5+)% /2% 7-/)%012*13% 0*)7% =+% :"33"<+6% =+:"5+%E"*% /2)71338% "4+517+% 126% 01/271/2% 7-+% A.>%
4*04$% (04"57127% )1:+7E% /2:"5017/"2% /)% -/B-3/B-7+6% 1)% FGH!(!I% 126% JGK.(L!% /2)75*97/"2)M% 7-+)+%
/2)75*97/"2)%15+%012617"5E$%.-+%*)+%":%FGH!(!IA%126%JGK.(L!A%/)%6+:/2+6%=+3"<N%
%
FGH!(!I%
%
F152/2B)%15+%B/#+2%<-+5+%:1/3*5+%7"%"=)+5#+%7-+%/2)75*97/"2%9"*36%5+)*37%/2%)+5/"*)%/2O*5E%
"5%6+17-%7"%4+"43+$%
%
JGK.(L!%
%
J1*7/"2)%15+%B/#+2%<-+5+%:1/3*5+%7"%"=)+5#+%7-+%/2)75*97/"2%9"*36%5+)*37%0/2"5%4+5)"213%/2O*5E%/2%
6101B+%7"%7-+%+P*/40+278%1))"9/17+6%+P*/40+27%126Q"5%45"9+))$%
Note: Items you must follow during operation and maintenance.
.-5"*B-"*7%7-/)%012*138%41B+8%:/B*5+%126%71=3+%2*0=+5)%15+%)+P*+27/13$%
.-+%*2/7)%*)+6%7-5"*B-"*7%7-/)%012*13%9"2:"50%7"%7-+%A(%/27+5217/"213%)E)7+0%":%*2/7)%":%
0+1)*5+0+27M%KA%+P*/#13+27%*2/7)%":%0+1)*5+0+27%15+%13)"%B/#+2$%
.-+%:"33"</2B%(;J%<152/2B%31=+3)Q)E0="3)%144+15%"2%7-+%A.>%>*04%(2)75*97/"2%R12*13N%
%
F152/2B%,%5+:+5%7"%%
199"0412E/2B%6"9*0+2717/"2$%
%%
%
F152/2B%,%5/)S%":%+3+975/9%)-"9S$%
%%
%
F152/2B%,%-+1#E%"=O+97$%
%
Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are
displayed on the LCD of the display unit iDT-001 (optional accessory). Note that the words
"WARNING" and "CAUTION" displayed on the LCD indicate the need for overhaul of the
pump or precautions during the operation. They do not have the same meaning as the much
more serious symbols for "WARNING" and "CAUTION" used in the instruction manual.

Table of Contents

Related product manuals