STP-iXA2205 Series Turbomolecular Pump
Nov. 10 viii Issue 1-h
PAGE
viii
TABLES (CONTINUED)
Table Title Page
47 Error List (continued) 151
48 Error List (continued) 152
49 Error List (continued) 153
50 Error List (continued) 154
51 Error List (continued) 155
52 Troubleshooting with no indication of the "FAILURE" LED 156
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