Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
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INSTALLATION
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3.13.6 Connecting the pump and TMS valve
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Note: When the two-way vale is closed, cooling water circulating whole device will stop.
Note: Procure and connect the cooling water pipe and affix the electromagnetic cooling water valve
at your site. The diameter of the valve is Rc1/4.
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3.13.7 TMS unit specification
Item Condition
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PW,469-01

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English