STP-iXA2205 Series Turbomolecular Pump
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OPERATION
4.4 Before starting the STP pump
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4.4.1 Confirmation before starting
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4.4.2 Confirmation of vacuum system
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Note: DO NOT open the vacuum valve without operating the backing-pump. Depending upon the
type of the backing-pump, doing so may cause a reverse flow of oil, which could contaminate
the inside of the STP pump.
Note: Avoid frequent start/stop operations as this may cause the STP pump to overheat.
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Note: DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type
of the backing-pump, doing so could cause a reverse flow of oil, which could contaminate the
inside of the pump.
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