STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% (a% *++,-%&./%
0%
OPERATION
4.4 Before starting the STP pump
OHPE*Q!%
%
!RbRI%;"11-;2%"8%95+;"11-;2%31<%;3=4-+%?/54-%2/-%7"?-8%5+%Q!$%!RbRI%2,81%2/-%785:38<%7"?-8%Qcc%
L2,81%2/-%AH*!%FQGRI%ZQccZM%?/54-%2/-%DEF%7,:7%5+%51%8"2325"1$%KQ%!QE%8-4-3+-%2/-%514-2%7"82%
B431@-%"8%",24-2%7"82%B431@-%512"%2/-%32:"+7/-8-%?/54-%2/-%DEF%7,:7%5+%8"23251@$%
%
4.4.1 Confirmation before starting
HB2-8%;":74-251@%51+2344325"16%75751@6%4-3C3@-%2-+2%"B%2/-%DEF%7,:76%319%?5851@%"B%2/-%7"?-8%;3=4-+6%2/-%
DEF%7,:7%5+%8-39<%B"8%+2382$%
&$% R1+,8-%2/-%DEF%7,:7%5+%51+2344-9%;"88-;24<%L8-B-8%2"%D-;25"1%YM$%
X$% R1+,8-%2/-%;"88-;2%+,774<%#"423@-%5+%37745-9$%
Y$% R1+,8-%344%;3=4-+%38-%+-;,8-4<%;"11-;2-9%319%4";C-9$%
%
4.4.2 Confirmation of vacuum system
&$% D238251@%=3;C51@.7,:7%
D2382%2/-%=3;C51@.7,:7%=-B"8-%"8%+5:,4231-",+4<%?52/%2/-%+2382%"B%2/-%DEF%7,:7$%Q7-1%2/-%#3;,,:%
#34#-%4";32-9%32%2/-%",24-2%7"82%B431@-%+59-%3B2-8%+238251@%2/-%=3;C51@.7,:7$%
Note: DO NOT open the vacuum valve without operating the backing-pump. Depending upon the
type of the backing-pump, doing so may cause a reverse flow of oil, which could contaminate
the inside of the STP pump.
Note: Avoid frequent start/stop operations as this may cause the STP pump to overheat.
X$% D2"7%=3;C51@.7,:7%
OHPE*Q!%
%
KQ%!QE%+2"7%2/-%=3;C51@.7,:7%?52/",2%;4"+51@%2/-%#3;,,:%#34#-$%K-7-1951@%,7"1%2/-%2<7-%"B%2/-%
=3;C51@.7,:76%9"51@%+"%;",49%;3,+-%3%8-#-8+-%B4"?%"B%32:"+7/-85;%358%512"%2/-%DEF%7,:76%?/5;/%:3<%
8-+,42%51%3%:34B,1;25"1$%
O4"+-%2/-%#3;,,:%#34#-%4";32-9%32%2/-% ",24-2%7"82%B431@-%+59-%],+2%=-B"8-%"8% 3B2-8%+2"7751@%2/-%DEF%
7,:7$%HB2-8%;4"+51@%2/-%#34#-6%+2"7%2/-%=3;C51@.7,:7$%
Note: DO NOT stop the backing-pump without closing the vacuum valve. Depending upon the type
of the backing-pump, doing so could cause a reverse flow of oil, which could contaminate the
inside of the pump.
To Next Page
Loading...
Need help?
General
