Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
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SERIAL COMMUNICATION PROTOCOL
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Parameter Item Data format Remark
&%
3,>9%"9-8@<4"A%=">>@A: (.J4<+%/-[@:-=4>@?%=":-:%
61T**%
B-F-8%<"%2@J?-%CC%
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Pump operation command Value
126B2% &%
12H3% 7%
Bd1d2% E%
2@J?-%CC%.%3,>9%"9-8@<4"A%=">>@A:+%
d[@>9?-k%
3,>9%"9-8@<4"A%=">>@A:% % k%Bd1d2%"9-8@<4"A%j%E%j%'E
/-[
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3@8@>-<-8% &%
61T**% '% E%
_d5% C'% CE%
%
5.4.4 ReadFailMess
R,A=<4"Ak% % B-@:+%</-%-88"8+%J-4AG%:-<-=<-:$%2/4+%:@<@%4+%</-%+@>-%:@<@%@+%</@<%"F%eB-@:U":R"A=<e%
9@8@>-<-8%7%<"%(&%"8%eB-@:U":R"A=<Z4</Z@8A4AGe%9@8@>-<-8%C%<"%(7$%
28@A+>4++4"A%F8@>-k%
3T.m1*U% 1<[% '% ' &% n% R% d<[ MBT %
1*U.m3T% % % % % % % % % 6=N
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3T.m1*U% % % % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% 19% R% 3@8@>-<-8%&%<"%(&
a&
d<[ MBT %
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Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English