Edwards STP-iXA2205 Series - Connecting the STP Pump Purge Port

STP-iXA2205 Series Turbomolecular Pump
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INSTALLATION
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Note: Maximum flow for water cooled and TMS unit are applicable under the condition listed in
Section 2.3, "Water cooling use condition".
3.10 Connecting the purge port
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Note: When not introducing the purge gas, close the purge port with the blank flange (attached on
delivery).
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