Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% b% ())*+%&,-%
INTRODUCTION
&%
1.7 Operation principle of the STP pump
.*5="0"3+9*315%4*04%?1==5+#/17+6%7"%@A.>%4*04@%7-5"*B-"*7%7-/)%012*13C%/)%*)+6%:"5%-/B-%#19**0%
4*04/2B$%(7%/)%45/29/4133E%*)+6%:"5%012*:197*5+%126%/2)4+97/"2%+P*/40+27%":%)+0/9"26*97"58%:317%412+38%
)"315%=177+5E$%
.-+%A.>%4*04%?`/B*5+%bC%/)%9"2:/B*5+6%)"%7-17%5"7"5%=316+%?&C%126%)717"5%=316+%?TC%15+%13/B2+6%
137+5217+3E%/2%7-+%1c/13%6/5+97/"2$%I1)%0"3+9*3+)%15+%4*04+6%:5"0%7-+%/23+7%4"57%7"%7-+%"*73+7%4"57%=E%
7-+%-/B-%)4++6%5"717/"2%":%7-+%5"7"5$%
.-+%A.>,/]GTT'[%)+5/+)%4*04%/)%1%)+5/+)%":%1%01B2+7/9133E,3+#/717+6%7*5="0"3+9*315%4*04)8%+19-%
</7-%7-+%:"33"</2B%:+17*5+)N%
&$% L/3%:5++%
T$% V"<%#/=517/"2%
Y$% _/B-%5+3/1=/3/7E%
Z$% J"04197%)/a+%?(27+B517+6%9"275"3%*2/7C%
[$% .+04+517*5+%0121B+0+27%)E)7+0%
X$% U*)7%126%<17+5%45"7+97/"2%?(>[Z%A+13+6C%
%
&$% H"7"5%=316+% Z$ H16/13%+3+975"01B2+7
^$ ."*9-%6"<2%=+15/2B%
T$% A717"5%=316+% [$ Gc/13%)+2)"5% b$
J"275"3%*2/7%
Y$% H16/13%)+2)"5% X$ Gc/13%+3+975"01B2+7%
%%
`/B*5+%b%,%J5"))%)+97/"213%#/+<%":%7-+%A.>%4*04%
&%
T%
Z%
X%
^%
Y%
Y%
[%
b%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English