STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &C&% *++,-%&./%
0
SERIAL COMMUNICATION PROTOCOL
5.4.18 ReadCondition
R,A=<4"Ak%B-@:+%</-%9,>9%>":-?%@A:%:@>@G-%9"4A<$%
28@A+>4++4"A%F8@>-k%
%%%%%%
a&
%%%
3T㸢1*U%
1<[% '% ' &% n% q% d<[ MBT %
1*U㸢3T%
%%%%%%%%6=N
%
3T㸢1*U%
%%%%%
a&
%%%6=N%
1*U㸢3T%
1<[% '% ' &% 19% q%
3@8@>-<-8%&%<"%E% d<[ MBT %
a&% 2/-%_d5%=":-%"F%61T**%=/@8@=<-8%y%q%y%4+%e`ce$%
%
Parameter Item Data format Remarks
&% 3,>9%>":-?% &S'.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
7% W1K+<->%8-+-8#@<4"AY% C7.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
C% Q@>@G-%9"4A<% &S.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
E% W1K+<->%8-+-8#@<4"AY% SE.J4<+%/-[@:-=4>@?%
=":-:%61T**%
%
%