Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &C7% *++,-%&./%
0%
SERIAL COMMUNICATION PROTOCOL
d[@>9?-k%
&$% 3,>9%>":-?k% % %
%0C0E0'7QS)0(E&C7C7C'C07'7'7'7'7'7'7'7'7'7'
/-[
%
% % % % % % % j%12345677'0%
C$% Q@>@G-%9"4A<k% % % C7
/-[
%j%0'%
3@8@>-<-8% &%
%e1e%e2e%e3e%e^e%e4e%e5e%e6e%e7e%e7e%e'e%
61T**%
0% C% 0 E% 0% '% 7 Q S ) 0 ( E & C 7 C% 7% C% '%
_d5%
C0% CC% C0 CE% C0% C'% C7 EE CS C) C0 C( CE C& CC C7 CC% C7% CC% C'%
%
3@8@>-<-8% &%
%
e0e% e%e% e%e% e%e% e%e% e%e% e%e% e%e% e%e% e%e%
61T**%
C% 0% 7 '% 7% '% 7 ' 7 ' 7 ' 7 ' 7 ' 7% '% 7% '%
_d5%
CC% C0% C7 C'% C7% C7% C7 C' C7 C' C7 C' C7 C' C7 C' C7% C'% C7% C'%
%
3@8@>-<-8% 7% C% E%
61T**%
a&% a&% a& a&% a&% a&% a& a&
''C7
a& a& a& a& a&% a&% a&% a&%
_d5%
%%%%%% C'C'CCC7 %%%%
%
3@8@>-<-8% E%
61T**%
a&% a&% a& a&% a&% a&% a& a&
_d5% % % % % % %
a&% 1K+<->%8-+-8#@<4"A%
%
%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English