EasyManua.ls Logo

Edwards STP-iXA2205 Series - Connecting the STP Pump Water Cooling

Edwards STP-iXA2205 Series
177 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% [f% *++,-%&./
INSTALLATION
)%
3.11 Connecting the water cooling pipe
MGND*O!%
%
JO%!OD%-=6"+-%1/-%:"017"3%,041%208%6">-7%,041%1"%>21-7%>/-0%40+17"3340?%"7%7-9"#40?%1/-%>21-7%
:""340?%646-$%
C-:,7-% 1/-% :"00-:14"0% 646-% 1"% 67-#-01% >21-7% 3-2B2?-% 208% ,+-% :""340?% >21-7% ,08-7% 1/-% :"08414"0+%
67"#48-8% 40% C-:14"0% ($)5% eF21-7% :""340?% ,+-% :"08414"0e$% *1% 4+% 7-:"99-08-8% 1"% :"00-:1% 1/-% >21-7%
:""340?% 646-+% 2::"7840?% 1"% 1/-% 847-:14"0% K*!% +48-% d% OND% +48-L% 40% Y4?,7-% V($% *0+1233% 2% +-:"083;%
:"012409-01%A"7%34W,48+%"7%2%>21-7%3-2B%8-1-:1"7%40%1/-%632:-%K-=$%:""340?%>21-7%6"71+L%>/-7-%:""340?%
>21-7%92;%3-2B$%Y4?,7-%V(%+/">+%1/-%6"+414"0%"A%1/-%:""340?%>21-7%6"71+$%D/-%CDE%6,96%40%Y4?,7-%V(%
4+%2%1;64:23%6,96%9"8-3$%H-A-7%1"%C-:14"0%(5%eDPMT!*MGS%JGDGe%A"7%1/-%:"0A4?,7214"0%"A%-2:/%CDE%
6,96$%
*0+1233%1/-%#23#-%1"%4+"321-%6,7?-%?2+%!
(
%"7%:""340?%>21-7%KS":B",1dD2?",1L%21%;",7%:"9620;$%
M"00-:1%1/-%:""340?%>21-7%646-%1"%1/-%6"71%1"%:""3%1/-%:"017"3%,041%208%6">-7%,041%"A%1/-%CDE.
4`G(('[M*E$%
%
%
KGL%CDE.4`G(('[MK^L% KUL%CDE.4`G(('[MEK^L% KML%CDE.4`G(('[M*E%
Y4?,7-%V(%.%E"+414"0+%"A%1/-%:""340?%>21-7%6"71%
㪠㪥%
㪦㪬㪫%
㪠㪥%
㪦㪬㪫%
㪠㪥
㪦㪬㪫

Table of Contents

Related product manuals