EasyManua.ls Logo

Edwards STP-iXA2205 Series - Powering ON the STP Pump; STP Pump Operation Overview; Setting STP Pump Input Operation Ports

Edwards STP-iXA2205 Series
177 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% (d% *++,-%&./%
0
OPERATION
4.5 Powering ON
E,81%ZQ!Z%2/-%ZAH*!%FQGRIZ%+?52;/%"1%2/-%7"?-8%,152$%G/-1%2/-%7"?-8%,152%5+%1"2%;"11-;2-9%2"%2/-%
;"128"4%,152%?52/%2/-%KO%;3=4-6%2/-%=8-3C-8%?544%2857$%*B%1"%-88"8%5+%B",196%2/-%:3@1-25;%=-3851@%B,1;25"1+%
319%2/-%8"2"8%4-#5232-+%LFQGRI%Q!%+232-M$%E/-%ZFQGRIZ%URK%544,:5132-+%51%@8--1%LU-#52325"1%+232-M$%
%
4.6 Pump operation
4.6.1 Input operation port setting
D-2%2/-%/389?38-%?/5;/%"7-832-+%2/-%DEF%7,:7%=-B"8-%2/-%"7-8325"1$%E/-%DEF%7,:7%5+%-_,577-9%?52/%
2/-%738344-4%7"82%LeX%IRAQER%;"11-;2"8M6%+-8534%7"82%OQA&%LeY%OQA&%;"11-;2"8M6%319%+-8534%7"82%
OQAX%Le0%OQAX%;"11-;2"8M%3+%+2319389%/389?38-%B"8%2/-%"7-8325"1$%E/-%DEF.U51C%L"725"134%
3;;-++"8<M%"8%2/-%95+743<%,152%5KE.''&%L"725"134%3;;-++"8<M%;31%"7-832-%2/-%DEF%7,:7%#53%2/-%+-8534%
7"82%OQAY%Le)%DEF.U51C%;"11-;2"8M6%+-8534%7"82%OQA0%Le&0%DEF.U51C%;"11-;2"8M%"B%2/-%7"?-8%,152$%
G/-1%+-2251@%2/-%517,2%"7-8325"1%7"82%2"%2/-%738344-4%7"826%8-B-8%2"%D-;25"1%0$d6%ZF38344-4%7"82%517,2N",27,2%
+5@134Z$%G/-1%+-2251@%2"%3%+-8534%7"826%8-B-8%2"%D-;25"1%)6%ZD-8534%O"::,15;325"1%F8"2";"4Z%B"8%
51B"8:325"1%319%:-2/"9+$%
E/-%:-2/"9%"B%"7-8325"1%?52/%2/-%738344-4%7"82%LeX%IRAQER%;"11-;2"8M%5+%+/"?1%=-4"?$%c"44"?51@%52%
3B2-8%8-3951@%2/8",@/%D-;25"1%0$d6%ZF38344-4%7"82%517,2N",27,2%+5@134Z$%G/-1%"7-83251@%2/-%DEF%7,:7%#53%
+-8534%;"::,15;325"16%8-B-8%2"%D-;25"1%)6%ZD-8534%O"::,15;325"1%78"2";"4Z$%
G/-1%"7-83251@%2/-%DEF%7,:7%#53%2/-%DEF.U51C%L"725"134%3;;-++"8<M%"8%2/-%95+743<%,152%5KE.''&%
L"725"134%3;;-++"8<M6%8-B-8%2"%-3;/%*1+28,;25"1%A31,34$%
%

Table of Contents

Related product manuals