2
2.2 Maximum gas flow-rate
Cooling water Gas
STP-iXA2205C
STP-iXA2205CP
STP-iXA2205CIP
STP-iXA2205CV
STP-iXA2205CPV
N
2
Pa·m
3
/s
(SCCM)
3.72
(2200)
2.70
(1600)
15 to 25 ºC
Ar Pa·m
3
/s
(SCCM)
2.36
(1400)
1.18
(700)
N
2
Pa·m
3
/s
(SCCM)
3.38
(2000)
2.70
(1600)
26 to 35 ºC
Ar Pa·m
3
/s
(SCCM)
1.86
(1100)
1.18
(700)
TMS (setting value) N/A 70 ºC
Purge gas flow rate <N
2
> Pa·m
3
/s
(SCCM)
8.4×10
-2
(50)
*1
The maximum gas flow-rate is applicable under conditions that N
2
or Ar gas is vacuumed continuously and the backing-pump
(pumping speed: 1,300 L/min) is used. It is changed depending on condition. For example, when the gas is exhausted
intermittently, the gas more than the maximum gas flow-rate can be exhausted. In this case, contact Edwards.
*2
When not using water-cooling system, a small amount of gas can be vacuumed, however, it is subject to effects of ambient
temperature and environment. Contact Edwards for details.
2.3 Water cooling use condition
Use cooling water which fulfills the following conditions.
Item Specification
Port type Rc 1/4 (Female)
Flow rate L/min 3
Water temperature °C 15 to 35
*1
Water pressure MPa (kgf/cm
2
)0.3 (3)
Maximum grain size mm
2
0.03
pH 6.5 to 8.0
Water hardness mg/L 100
Resistivity
kȍ䍃cm
4 to 1000
Turbidity FNU < 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)
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