STP-iXA2205 Series Turbomolecular Pump
Nov. 10 i Issue 1-h
PAGE
i
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Applied standards 2
1.3 Limited warranty 2
1.3.1 Warranty period 2
1.3.2 Item warranted 2
1.3.3 Disclaimer 3
1.3.4 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 8
1.8 STP pump specification 10
2 TECHNICAL DATA 13
2.1 STP pump specifications 13
2.2 Maximum gas flow-rate 14
2.3 Water cooling use condition 14
2.4 Control unit 15
2.5 Power unit 16
2.6 External appearance of the STP pump 17
2.7 External appearance of the power unit 20
2.8 Label affixing positions 21
3 INSTALLATION OF THE STP PUMP 23
3.1 Precautions before installation 23
3.1.1 Operating environment 23
3.1.2 Installation area 25
3.1.3 Bench 26
3.1.4 Insulation test 26
3.2 Unpacking 27
3.2.1 Unpacking the STP pump 27
3.3 Name and function of each part 32
3.3.1 Name and function of the pump 32
3.3.2 Name and function of the control unit 33
3.3.3 Name and function of the power unit 35
3.4 How to install the STP pump 37
3.4.1 Cleaning the seal 39
3.4.2 STP pump installation positions 40
3.4.3 Secure the STP pump 41
3.4.4 Legs for securing the base 46
3.5 Installation of the power unit 47
3.6 External power supply unit 48
3.7 DC cable for external power supply unit 48