STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% [Z% *++,-%&./
INSTALLATION
)%
3.13 Installation of the TMS unit
%
FGH!*!I%
%
D/-%CDE%6,96%"6-721-+%21%/4?/%1-96-721,7-+%>/43-%1/-%D-96-721,7-%@202?-9-01%
C;+1-9%KD@CL%,041%4+%40%"6-7214"0$%!P^PH%1",:/%1/-%CDE%6,96%208%41+%6-746/-723%
-W,469-01%>/43-%D@C%,041%27-%40%"6-7214"0$%O6-721"7+%:20%<,70%/208+$%
D/-%D-96-721,7-%@202?-9-01%C;+1-9%KD@CL%92401240+%1/-%1-96-721,7-%"A%1/-%1,7<"9"3-:,327%
6,96%<;%9"041"740?%1/-%1-96-721,7-%>41/%1-96-721,7-%+-0+"7%40%1/-%<2+-%"A%1/-%1,7<"9"3-:,327%6,965%
208%6-7A"7940?%1/-%D@C%#23#-%208%D@C%/-21-7%O!dOYY%:"017"3%40%"78-7%1"%92401240%2%:"0+1201%
1-96-721,7-%"A%1/-%CDE%6,96$%
Note: The TMS unit is not available depending on the STP pump model. Refer to Section 2,
"TECHNICAL DATA" and confirm whether the TMS unit can be used for the STP pump.
%
3.13.1 Configuration of the STP pump with the TMS
%%
&$% CDE%6,96% a$ D@C%/-21-7%:2<3-%
($% D@C%/-21-7%KU,431.40L% f$ JM%:2<3-%
)$% E">-7%,041% g$ D@C%/-21-7%-=1-0+4"0%:2<3-%
V$% D@C%#23#-%% Z$ E">-7%:2<3-%
[$% M"017"3%,041% % %
Y4?,7-%VV%.%M"0A4?,7214"0%"A%1/-%D@C%KCDE.4`G(('[M^L%
[
V%
Z%
a%
f
g%
&%
)
(%