Edwards STP-iXA2205 Series User Manual

STP-iXA2205 Series Turbomolecular Pump
!"#$%&'% &&7% *++,-%&./%
0%
SERIAL COMMUNICATION PROTOCOL
5.4.5 ReadModFonct
R,A=<4"Ak%B-@:+%</-%9,>9%"9-8@<4"A%>":-%@A:%</-%-88"8+%J-4AG%:-<-=<-:$%2/-%:@<@%"F%-88"8+%J-4AG%
:-<-=<-:%8-@:+%</-%+@>-%:@<@%@+%</@<%"F%eB-@:R@4?U-++e$%
28@A+>4++4"A%F8@>-k%
3T.m1*U% 1<[% '% ' &% n% U d<[ MBT %
1*U.m3T% % % % % % % % % 6=N
%
3T.m1*U% % % % % % % % % % 6=N
1*U.m3T% 1<[% '% ' &% 19% U 3@8@>-<-8%&%<"%(7
a&
d<[ MBT %
%
Parameter Item Data format Remarks
&% 3,>9%"9-8@<4"A%>":-% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
B-F-8%<"%2@J?-%CS
7% 2/-%A,>J-8%"F%-88"8% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
V9%<"%('%-88"8+%
a&
d88"8%&% (.J4<+%/-[@:-=4>@?%
=":-:%61T**%
s% s%
C%<"%(7
a&
%
d88"8%('
a&
%(.J4<+%/-[@:-=4>@?%
=":-:%61T**%
a7%
a&% 2/-%>@[4>,>%A,>J-8%"F%-88"8+%>@K%:4FF-8%:-9-A:4AG%,9"A%</-%+"F<;@8-%#-8+4"A%"F%</-%123%9,>9$%*<%4+%8-=">>-A:-:%</@<%
@A%@99?4=@<4"A%J-%:-+4GA-:%@+%#@84@J?-.?-AG</%:@<@$%
a7% X@?,-%="88-+9"A:4AG%<"%</-%-88"8%>-++@G-%4+%<8@A+>4<<-:%O8-F-8%<"%2@J?-%CE%@A:%2@J?-%C0P$%2/-%>"+<%8-=-A<%-88"8%/@+%</-%
?@8G-+<%9@8@>-<-8%A,>J-8$%Z/-A%</-%A,>J-8%"F%-88"8+%J-4AG%:-<-=<-:%4+%,A:-8%</-%>@[4>,>%A,>J-8I%</-%#@?,-%"F%
9@8@>-<-8%</@<%4+%?@8G-8%</@A%</-%A,>J-8%"F%-88"8+%J-4AG%:-<-=<-:%4+%+-<%<"%'$%

Edwards STP-iXA2205 Series Specifications

General

Brand	Edwards
Model	STP-iXA2205 Series
Category	Water Pump
Language	English